Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Centre National De La Recherche Scientifique

Universite Claude Bernard – Lyon1

Cpe Lyon Formation Continue Et Recherche

François Martin

Hubert Moriceau

Philippe Gilet

Franck Fournel

Thierry Baron

Amélie Dussaigne

Joël Eymery

Pierre Mur

Remy Gassilloud

Stéphane Cadot

Rémy Gassiloud

Elsje Quadrelli

Nol Magnea

Method for manufacturing a thin layer of textured AlN comprising the following successive steps: a) providing a substrate having an amorphous surface, b) forming a polycrystalline nucleation layer of MSwith M=Mo, W or one of the alloys thereof, on the amorphous surface of the substrate, the polycrystalline nucleation layer consisting of crystalline domains the base planes of which are parallel to the amorphous surface of the substrate, the crystalline domains being oriented randomly in an (a, b) plane formed by the amorphous surface of the substrate, c) depositing aluminum nitride on the nucleation layer, leading to the formation of a thin layer of textured AlN.

Method for manufacturing a layer of textured aluminum nitride

A process for producing a conducting electrode on a substrate, including: depositing a layer made of a dielectric; depositing a protective layer made of the nitride of a metal on the dielectric layer; depositing a functionalization layer made of a material including a chemical species, such that the free enthalpy of formation of the nitride of the species is less, in absolute value, than the free enthalpy of formation of the nitride of the metal of the protective layer over the temperature range between 0&#xb0; C. and 1200&#xb0; C.; and annealing the assembly including the protective layer and the funtionalization layer so that the species diffuse from the functionalization layer into the protective layer and the nitrogen atoms migrate from the protective layer into the functionalization layer.

Process for producing a conducting electrode

Growing community of inventors

Grenoble, France

François Martin