Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Ag

Franz-Otto Kopp

Martin Henzler

Hannes Frischat

Ralf Kumpe

A device for examining the smoothness of a sample surface includes a scattered-light instrument for scanning the surface with a focused laser beam and for detecting scattered light which is reflected during the scanning of the surface. There is also an instrument for microscopic examination of prominently light-scattering regions of the surface after they have been identified using the scattered-light instrument. This device has an evacuable sample chamber, in which the sample is placed on a sample holder and which has a transparent window through which the laser beam passes before it strikes the surface of the sample. There is also a method for examining a sample using the device.

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Hannover, Germany

Franz-Otto Kopp