Infineon Technologies Ag

Pmdtechnotogies Ag

Franz Michael Darrer

Marcus Edward Hennecke

Christoph Steiner

Georg Schitter

David Brunner

Han Woong Yoo

Walter Schuchter

Stephan Gerhard Albert

Gerald Holweg

Richard Schroedter

Markus Dielacher

Boris Kirillov

Martin Flatscher

Stefan Mendel

Michael Mark

Josef Prainsack

Ralf-Rainer Schledz

Hendrikus Van Lierop

Philipp Greiner

Dirk Hammerschmidt

Horst Theuss

Klaus Elian

Guenther Ruhl

Stefano Marsili

Jochen Dangelmaier

Norbert Druml

Michael Kandler

Mathias Vaupel

Matthias Eberl

Thomas Leutgeb

Manfred Fries

Christof Michenthaler

Alexander Bergmann

Benjamin Kollmitzer

Thomas Herndl

Thomas Mueller

Cesare Buffa

Jakob Jongsma

Thomas Thurner

Alessandro Caspani

Martin Graefling

Tue Fatt David Wee

Matthias Rose

Thomas Gigl

Constantin Crisu

Christoph Unterrieder

Alexander Schossmann

Stephan Auer

Michiel Helsloot

Sie Boo Chiang

Christian Hambeck

Constantin Stroi

Jürgen Fehle

Vlad Buiculescu

Francesco Secli

Stefan Mahlknecht

Dan Ioan Dumitru Stoica

Matthias Böhm

A method comprises applying a driver voltage to an electrostatic comb drive of an MEMS apparatus and overlaying the driver voltage with a periodic voltage signal. The method further comprises determining a torsion angle of a mirror body of the MEMS apparatus based on the periodic voltage signal.

Method for determining a torsion angle of a mirror body of an MEMS apparatus

An oscillator control system includes an oscillator structure configured to oscillate about first and second rotation axes according to a Lissajous pattern, wherein an oscillation about the second rotation axis imparts a cross-coupling error onto an oscillation about the first rotation axis, and wherein the cross-coupling error changes in accordance with a Lissajous position within the Lissajous pattern; and a driver circuit that includes a phase-locked loop (PLL) configured to regulate a driving signal that drives the oscillation about the first rotation axis. The PLL is configured to generate a PLL signal based on a phase error of the oscillation about the first rotation axis. The PLL includes a compensation circuit configured to receive the PLL signal and the Lissajous position within the Lissajous pattern, apply a compensation value to the PLL signal to generate a compensated PLL signal used for generating the driving signal based on the Lissajous position.

Detection, correction, and compensation of coupling effects of microelectromechanical system (MEMS) axes of a two-dimensional scanning structure

A sensor circuit, having a startup phase and an operation phase, includes: a sensor configured to generate a sensor signal based on a measured property, wherein the sensor signal has a frequency spectrum defined by a first frequency and a second frequency that is greater than the first frequency; a signal processing circuit including an analog-to-digital converter (ADC) configured to convert the sensor signal into a digital sensor signal; and an offset diagnosis circuit. The offset diagnosis circuit includes: a low pass filter having a cutoff frequency less than the first frequency and configured to generate a filtered signal based on the digital sensor signal; an offset register configured to store a startup signal value of the filtered signal during the startup phase; and an offset comparator circuit configured to set a threshold range based on the startup signal value for use during the operation phase.

Gain and offset diagnosis of analog-to-digital converters in sensor signal path

A scanning system includes a microelectromechanical system (MEMS) scanning structure configured with a desired rotational mode of movement based on a driving signal; a plurality of comb-drives configured to drive the MEMS scanning structure according to the desired rotational mode of movement based on the driving signal, each comb-drive including a rotor comb electrode and a stator comb electrode that form a capacitive element that has a capacitance that depends on the deflection angle of the MEMS scanning structure; a driver configured to generate the at least one driving signal; a sensing circuit selectively coupled to at least a subset of the plurality of comb-drives for receiving sensing signals therefrom, wherein each sensing signal is representative of the capacitance of a corresponding comb-drive; and a processing circuit configured to determine a scanning direction of the MEMS scanning structure in the desired rotational mode of movement based on the sensing signals.

Method of mode coupling detection and damping and usage for electrostatic MEMS mirrors

An oscillator system includes an electrostatic oscillator structure configured to oscillate about an axis based on a deflection that varies over time; an actuator configured to drive the electrostatic oscillator structure about the axis, the actuator including a first capacitive element having a first capacitance dependent on the deflection and a second capacitive element having a second capacitance dependent on the deflection; a sensing circuit configured to receive a first displacement current from the first capacitive element and a second displacement current from the second capacitive element, to integrate the first displacement current to generate a first capacitive charge value, and to integrate the second displacement current to generate a second capacitive charge value; and a measurement circuit configured to receive the first and the second capacitive charge values and to measure the deflection of the electrostatic oscillator structure based on the first and the second capacitive charge values.

Capacitive charge based self-sensing and position observer for electrostatic MEMS mirrors

A torque measurement system includes an outer rotational shaft and an inner rotational shaft both configured to rotate about a rotational axis. A rotation of the inner rotational shaft causes a rotation of the outer rotational shaft via a coupling structure. At least one torque applied to the inner rotational shaft is translated into a first torque-dependent angular shift between the shafts. A first metamaterial track is coupled to the outer rotational shaft and configured to co-rotate with the outer rotational shaft. A second metamaterial track is coupled to the inner rotational shaft and configured to co-rotate with the inner rotational shaft. The tracks are configured to convert an electro-magnetic transmit signal into a first electro-magnetic receive signal based on the first torque-dependent angular shift and a receiver is configured to receive the electro-magnetic receive signal and measure the at least one torque based on the electro-magnetic receive signal.

Metamaterial based torque and shaft rotational speed sensor

A receiver for a light detection and ranging system includes detecting elements, each configured to convert light into an analog detection signal. The receiver includes a first converting element configured to provide a first digital detection signal in response to a first analog detection signal. The first converting element is configured to use a first number of bits to represent the first analog detection signal. The receiver includes a second converting element configured to provide a second digital detection signal. The second converting element is configured to use a second number of bits to represent the second analog detection signal. The second number of bits is greater than the first number of bits. The receiver comprises a processing module configured to determine a first parameter of an object using the first digital detection signal and a second parameter of the object using the second digital detection signal.

LIDAR system, a method for a LIDAR system and a receiver for LIDAR system having first and second converting elements

An oscillator control system includes an non-linear oscillator structure configured to oscillate about an axis; a driver circuit configured to generate a driving signal to drive the oscillator structure; a detection circuit configured to measure an angle amplitude and a phase error of the oscillator structure; an amplitude controller configured to generate a reference oscillator period based on the measured angle amplitude; a period and phase controller configured to receive the reference oscillator period and the measured phase error from the detection circuit, generate at least one control parameter of the driving signal based on the reference oscillator period and the measured phase error, and determine a driving period of the driving signal based on the reference oscillator period and the measured phase error. The driver circuit is configured to generate the driving signal based on the at least one control parameter and the driving period.

Control structure for oscillators with nonlinear frequency response

A method for determining malfunction is provided. The method includes receiving a 1D or 2D luminance image of a scene from a time-of-flight based 3D-camera. The luminance image includes one or more pixels representing intensities of background light received by an image sensor of the 3D-camera. The method further includes receiving a 2D optical image of the scene from an optical 2D-camera and comparing the luminance image to the optical image. If the luminance image does not match the optical image, the method additionally includes determining malfunction of one of the 3D-camera and the 2D-camera.

Method and apparatus for determining malfunction, and sensor system

A tire-pressure monitoring system (TPMS) sensor module comprises a pressure sensor, which is configured to measure an internal air pressure of a tire and to generate tire pressure information, an additional, optional sensor, a transmitting/receiving device, a microcontroller unit which is configured to operate the TPMS sensor module in one of three or more different operating modes, wherein a first operating mode includes an inactive standby state, a second operating mode includes a measurement of a physical parameter using the pressure sensor and/or the additional sensor and reading the pressure sensor and/or the additional sensor using the microcontroller unit, and a third operating mode, and wherein in the second operating mode the microcontroller unit is configured to initiate a changeover from the second operating mode to the third operating mode when reading out a specified measurement event.

Method for adjusting a TPMS sensor module, and TPMS sensor module

There are disclosed techniques for laser scanning control. A system includes control equipment to perform a coordinated scanning control by controlling: a mirror driver, to drive a mirror along desired mirror positions through a motion mirror control signal; and a laser driver, to generate laser light pulses to be impinged onto the mirror at the desired mirror positions through a pulse trigger control signal. The control equipment includes a motion estimator to provide estimated motion information based on feedback motion measurement(s), to generate the pulse trigger control signal by adapting a desired scheduling, for triggering the laser light pulses, to the estimated motion information.

Laser scanning control system and method

A MEMS device includes a body pivoting around a pivot axis, a support, and a suspension structure mechanically coupling the body to the support. The suspension structure includes a torsion element defining the pivot axis, and first and second spring elements extending with an angle relative to the pivot axis on opposing sides of the torsion element so that a distance between at least portions of the first and second spring elements is changing in the direction of the pivot axis. The extension of the first and second spring elements in the direction of the pivot axis is larger than the extension of the torsion element in the direction of the pivot axis.

MEMS device with suspension structure and method of making a MEMS device

Embodiments provide a tire pressure measurement device that includes an electromechanical transducer configured to convert mechanical energy from tire deformation of a tire into electrical energy for powering the tire pressure measurement device; and an energy harvesting circuit configured to receive and store the electrical energy from the electromechanical transducer, where the energy harvesting circuit is further configured to supply the stored electrical energy to the tire pressure measurement device.

Tire pressure measurement device, an integrated circuit, a printed circuit board, a method and a computer program for a vehicle to receive data

Disclosed is an apparatus which has, among other things, a MEMS device with a first measurement arrangement for capturing a measurement variable (X) based on a physical variable, which has a useful variable component (N) and a first disturbance variable component (Z), and a second measurement arrangement for capturing a second disturbance variable component (Z). The apparatus furthermore has a disturbance compensation circuit which is configured to combine the second disturbance variable component (Z) and the measurement variable (X) with one another and to obtain a disturbance-compensated measurement variable (X). The MEMS device is arranged in a housing, wherein the MEMS device is in immediate mechanical contact with the housing by way of at least 50% of a MEMS device surface.

Packaged MEMS device with disturbance compensation

Growing community of inventors

Graz, Austria

Franz Michael Darrer