Technische Universitäet Wien

Franz Keplinger

Alexander Dabsch

Christoph Rosenberg

Andreas Kainz

A force sensor includes a frame and an oscillation structure which has arms and can oscillate freely in the frame. The arms are fixed to suspension frame regions and run transverse to one another at least in sections. At least one conductor extends along at least two arms. An AC voltage can be applied to the at least one conductor to excite at least one oscillation mode of the oscillation structure with a resonant frequency using Lorentz force. The force sensor is designed such that the suspension regions are at least partially spatially displaced relative to one another when a force is applied to the frame, that the magnitude of the spatial displacement of the suspension regions depends on the magnitude of the force, and that the spatial displacement of the suspension regions causes detuning of the resonant frequency, the magnitude of which depends on the spatial displacement magnitude.

Force sensor

Sensor for determining a rotation angle (&#x3b8;) about a rotation axis. The sensor includes a rotary element mounted in a base element so as to be rotatable about the rotation axis. The rotary element is made from a first material having a first refractive index n1 and is constructed from several layers. At least one light generating device is fixedly arranged relative to the base element. At least one light detection device is fixedly arranged relative to the base element and configured to detect a light signal. At least one refractive structure is arranged in each layer and has a second refractive index n2, wherein n2&#x2260;n1. The at least one beam path extends at least in a first rotation angle range through the at least one refractive structure in order to be able to assign a specific rotation angle (&#x3b8;) to the light signal detected by the at least one light detection device at least in the first rotation angle range.

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Vienna, Austria

Franz Keplinger