Leica Microsystems Semiconductor Gmbh

Leica Microsystems Cms Gmbh

Franz Cemic

Lambert Danner

Uwe Graf

Gerhard Hoppen

Robert Mainberger

Martin Osterfeld

Michael Veith

Dirk Sönksen

Volker Knorz

A device and method for inspecting an object () uses a bright field illumination beam path () of a bright field light source (), said beam path being formed so that it passes through the projection optics (), and a dark field illumination beam path () of a dark field light source (), this beam path being formed so that it also passes through the projection optics (). The object () can be projected by the projection optics () onto the least one detector (), and the object () is simultaneously illuminated by both light sources (). In order to simultaneously detect bright field images and dark field images without involving complicated filtering operations, the light used for the dark field illumination is pulsed and the pulse intensity of the light used for the dark field illumination is greater by at least one order of magnitude than the intensity of the continuous light, which is used for the bright field illumination, during a pulsed interval.

Device and method for inspecting an object

A coordinate measuring instrument includes a horizontally X-Y displaceable measurement stage for receiving a substrate with a feature that is to be measured, an illumination system, and a detector device. The illumination system includes a light source, an optical fiber bundle, a coupling-in optical system before the optical fiber bundle, a coupling-out optical system after the optical fiber bundle, an illuminating optical system for illuminating an image field, and a homogenizing optical system which is arranged between said coupling-out optical system and said illuminating optical system. The homogenizing optical system homogenizes the non-uniform intensity distribution in the image field of the light emerging from the optical fiber bundle. The light of said light source is picked off via said coupling-in optical system with a large numerical entrance aperture, and is coupled into said optical fiber bundle. The detector device determines the values of X and Y coordinates of the feature within the X-Y displaceable measurement stage.

Illumination device, and coordinate measuring instrument having an illumination device

An illumination device according to the present invention comprises a light source (), an optical fiber bundle (), a coupling-in optical system () before and a coupling-out optical system () after the fiber bundle (), and an illuminating optical system (). A homogenizing optical system () between the coupling-out optical system () and illuminating optical system () brings about a homogenization of the intensity distribution in the image field. The homogenizing optical system () advantageously comprises a micro-honeycomb condenser () and a lens member () which superimpose the exit opening of the fiber bundle () in an intermediate image plane () to form a homogeneous intermediate image. The coordinate measuring instrument comprises an X-Y measurement stage () for receiving a substrate with a feature () that is to be measured, an illumination system with a light source (), an optical fiber bundle (), a coupling-in optical system (), a coupling-out optical system (), an illuminating optical system () for illuminating an image field on the substrate, and a detector device () for determining the position of the feature. A homogenizing optical system () between the coupling-out optical system () and illuminating optical system () brings about a homogenization of the intensity distribution in the image field.

Illumination device; and coordinate measuring instrument having an illumination device

A critical dimension measuring instrument includes a light source, a beam-shaping optical system, a condenser having a condenser pupil, a first microlens array arrangement, a first auxiliary optical element having positive refractive power, a second auxiliary optical element having positive refractive power, and a second microlens array arrangement. The first microlens array arrangement, the first auxiliary optical element, the second auxiliary optical element and the second microlens array arrangement are arranged in successive fashion between the beam-shaping optical system and the condenser.

Critical dimension measuring instrument

An autofocus module for a microscope-based system includes at least two light sources, each of which generates a light beam for focusing. An optical directing device is provided that directs a respective portion of each light beam onto an incoupling means, which couples each of the light beams into the illuminating light beam of the microscope-based system and directs the light beams onto a specimen. A first and a second detector receive the light beams of the first and second light source reflected from the surface of the specimen, and ascertain the intensities on the first and second detector in time-multiplexed fashion.

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Weilmuenster, Germany

Franz Cemic