Carl Zeiss Smt Gmbh

Frank Weigl

Konstantin Forcht

Horst Feldermann

A reflective optical element, in particular for a DUV or VUV operating wavelength range, includes a substrate, a dielectric layer system and a metallic coating between the substrate and the dielectric layer system. The dielectric layer system () includes a layer (L) of material having a lower refractive index nat the operating wavelength, a layer (H) of material having a higher refractive index nat the operating wavelength and a layer (M) of material having a refractive index nat the operating wavelength, where n&#x3c;n&#x3c;n. The layer (M) is arranged at at least one transition from a layer (L) to a layer (H) and/or from a layer (H) to a layer (L). The dielectric layer system has a four-layer sequence of (LMHM)m or (HMLM)m, where m is equal to the number of four-layer sequences in the dielectric layer system.

Growing community of inventors

Holzheim, Germany

Frank Weigl