Lambda Physik Gesellschaft Zur Herstellung Von Lasern Mbh

Lambda Physik Forschungs-und Entwicklungs-gesellschaft Mbh

Lamba Physik Gesellschaft Zur Herstelling Von Lasern Mbh

Frank Voss

Dirk Basting

Gerd Steinfuhrer

Ru/ Diger Ludewig

A Meller

Anton Meller

An electrode for a gas discharge laser. Electrodes which consist, at least in part, of zirconium are suggested for use in gas discharge lasers containing fluorine.

Discharge unit and electrode for a pulsed discharge laser

An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liqid nitrogen (12).

Apparatus for purifying laser gas

An excimer laser including a gas reservoir in which gas discharge is effected with the participation of halogen gas, comprises a collecting receptacle which communicates both with the gas reservoir and a halogen gas supply through conduits provided with shutoff valves. This apparatus is suitable for carrying out a method of refilling the gas reservoir of the excimer laser with halogen gas even if the pressure of the halogen gas supply is low and its volume restricted.

Excimer laser comprising a gas reservoir and a collecting receptacle and

Laser comprising at least one anode (1) and one cathode (2) for preionization and main discharge, the anode (1) and the cathode (2) having different standard potentials. The laser is distinguished by high reliability and long life. After several hours of operation, practically no material erosion at all is found at the electrodes.

Laser having at least one anode and one cathode for preionization and/or

An excimer laser having a chamber (10) in which a gas-discharge is performed with participation of hydrogen-chloride comprises means with which the hydrogen chloride is formed by hydrolysis.

Excimer laser with hydrogen chloride and method for producing hydrogen

An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liquid nitrogen (12).

In an apparatus for purifying laser gas, comprising a cooling circuit for cleaning of the laser gas, the cooling circuit is separable from the laser and operable by way of a shunt line, independently of the laser.

Laser gas purifying apparatus

An apparatus for purifying laser gas comprises first and second tubes 20, 22 in good thermal contact, liquid nitrogen flowing through the first tube 20 and laser gas flowing through the second tube 22. The laser gas is precooled in an arrangement of third and fourth tubes 24, 26, the laser gas to be cleaned entering the third tube 24 which opens into the second tube 22 so that precooled laser gas enters the second tube which opens into the fourth tube to effect the precooling.

Growing community of inventors

Gottingen, Germany

Frank Voss