Aehr Test Systems, Inc.

Genus, Inc.

Aeha Test Systems

Frank Otto Uher

Donald Paul Richmond, Ii

Mark Charles Carbone

Jovan Jovanovic

Scott E Lindsey

Kenneth W Deboe

Thomas T Maenner

Long V Vu

Patrick M Shepherd

James F Tomic

Paul W Burke

Doan D Cao

Jeffrey L Tyson

John William Andberg

Sien G Kang

Raymond L Chow

Johannes J Schmitz

Norman L Turner

Jerzy Lobacz

Steven C Selbrede

Frederick J Scholz

Edward J Rode

An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.

Apparatus for testing electronic devices

A cartridge () includes a chuck plate () for receiving a wafer () and a probe plate () for establishing electrical contact with the wafer. In use, a mechanical connecting device () locks the chuck plate and the probe plate fixed relative to one another to maintain alignment of the wafer and the probe plate. Preferably, electrical contact with the wafer is established using a probe card () that is movably mounted to the probe plate by means of a plurality of leaf springs (.) The mechanical connecting device is preferably a kinematic coupling including a male connector () and first and second opposed jaws (.) Each of the jaws is pivotable from a retracted position in which the male connector can be inserted between the jaws and an engaging position in which the jaws prevent withdrawal of the male connector from between the jaws. The male connector is movable between an extended and a retracted position, and is biased towards the retracted position. This provides a positive clamping force that pulls the chuck and probe plates together when the mechanical connecting device is engaged. To load a wafer into the cartridge, the wafer is placed on the chuck plate, the probe plate is aligned with the wafer, and the chuck plate and the probe plate are locked together. The cartridge can then be removed from the alignment device and placed in a burn-in or test chamber that does not itself require means for aligning the wafer or for providing a probe actuation force.

Wafer burn-in and text employing detachable cartridge

A method of assembling a test contactor is described. The method includes aligning an interposer and an electrical contactor wherein resilient interconnection elements of the interposer are resiliently deformed into a deformed state to make electrical contact with corresponding electrical terminals on the electrical contactor; and securing the interposer and the electrical contactor together to lock the resilient interconnection elements in said deformed state.

Contactor assembly for testing electrical circuits

Growing community of inventors

Los Altos, CA, United States of America

Frank Otto Uher