Schott Ag

Frank Koppe

Christian Henn

Lutz Klippe

Stephan Behle

Lars Bewig

Stefan Bauer

Christoph Moelle

Thomas Kuepper

Thomas Küpper

Wolfram Maring

Stefan Geisler

Jürgen Dzick

Juergen Dzick

Detlef Wolff

Jochen; Heinz

The invention relates to layer systems having at least one layer comprising titanium aluminum oxide. The layer comprising titanium aluminum oxide may be either a functional layer&#x2014;with or without interruption by an intermediate layer which is optically inactive&#x2014;or a functional layer formed from a metal oxide which is interrupted by an intermediate layer comprising titanium aluminum oxide. The layer systems are structurally and thermally stable at operating temperatures of over 600&#xb0; C. The layer systems may either comprise only one functional layer or may be a multilayer system, preferably an alternating layer system composed of functional layers with high and low refractive indices.

Layer system

A method of producing substrates with functional layers which have high optical properties and/or a high surface smoothness, in particular a low turbidity and significantly lower roughness, is provided. The method includes a sputtering process for coating a substrate with at least one functional layer, the sputtering process being interrupted at least once by the application of an intermediate layer with a thickness of less than 20 nm.

Process for producing layers and layer systems, and coated substrate

The invention relates to a coated object in which coatings remain of a constant and unchanged high quality despite operating temperatures of more than 350&#xb0; C. This is achieved with interlayers which deliberately interrupt and thereby stabilize the morphology of the coating.

Coated object

Growing community of inventors

Bad Gandersheim, Germany

Frank Koppe