Integrated Dynamics Engineering Gmbh

Frank Hofmann

Arndt Evers

Han Hartgers

Till Scharf

A vibration isolator with a pneumatic spring that is effective only in vertical direction, the pneumatic spring including a working space in which a vertically effective actuator is disposed.

Vibration isolator with a vertically effective pneumatic spring

A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.

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Rosbach, Germany

Frank Hofmann