Endress+hauser Gmbh+co. Kg

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Endress U. Hauser Gmbh U. Co.

Endress + Hauser Gmbh + Co.

Endress&plus;hauser Gmbh&plus;co.

Envec Mess-und Regeltechnik Gmbh + Co.

Endress + Hauser Conducta Gesellschaft Fur Mess-u. Regeltechnik Mbh +co. Kg

Endress &plus; Hauser Gmbh &plus; Co. Kg

Gfe Metalle Und Materialien Gmbh

Envec Mess- Und Regeltechnik Gmbh &plus; Co.

Endress+hauserse+co. Kg

Endress U. Hauser Gmbh U.co. Kg

Frank Hegner

Elke Maria Schmidt

Ulfert Drewes

Andreas Rossberg

Thomas Klahn

Thomas Uehlin

Karlheinz Banholzer

Karl Fl&ouml;gel

Bernd Rosskopf

Rainer Martin

Karl Flögel

Thomas Velten

Manfred Frank

J&uuml;rgen Breme

Igor Getman

Peter Gerst

Traugott Kallfass

Karl-Heinz Banholzer

Wolfgang Woest

Andreas Otto

Volker G&uuml;ther

Peter Reimann

Heinz Breitenstein

Stephan Messmer

Jurgen Breme

Heinz Muller

Rainer Silbermann

J&uuml;rgen Peter Turnsek

Heinz M&uuml;ller

Henry Ludwig

Michael Kirst

Michael Philipps

Jörg Müller

Ingolf Voigt

Ernst Luder

Georg Schneider

Andreas Roβberg

Gerhard Dittrich

Andreas Roßberg

Jorg Muller

Lukas Klausmann

Barbel Voigtsberger

Masoud Habibi

Marco Doms

Frank Kastner

Uta Oberbach

Bernhard Walter

Sabine Stolle

Christel Kretschmar

Jurgen Peter Turnsek

Melanie Hentsche

Karl Floegel

Winfried Schaffrath

Peter Otschick

Theophil Eicher

Anobecs Allo

A method for manufacturing a connection between two ceramic parts comprises: providing a first ceramic part and a second ceramic part; providing an active hard solder, or active braze, on at least one surface section of at least one of the ceramic parts; and heating the active hard solder, or active braze, in a vacuum soldering, brazing process. The entire active hard solder, or active braze, for connecting the first and second ceramic parts is provided in such a manner that at least one surface section of at least one of the ceramic parts, preferably both ceramic parts, is coated by means of gas phase deposition of the alloy of the active hard solder, or active braze.

Method for manufacturing a connection between two ceramic parts, especially parts of a pressure sensor, and a ceramic product, especially a ceramic pressure sensor

A method for manufacturing an elastic deformation body made of an AlOceramic according to which a highly pure alumina having at most 2000 ppm MgO, at most 200 ppm inorganic impurities, a specific surface of at least 10 m/g, an average grain size of at most 0.3 &#x3bc;m is applied. With the alumina and additives, there is produced via aqueous processing a homogeneous mixture, from which a pressable spray granulate is produced, which is formed by means of a uniaxial pressing method to a homogeneous, green body, which is subjected to a sinter process. The resulting elastic deformation body has a bending fracture stress &#x3c3;, whose distribution F(&#x3c3;) is given by the Weibull parameters &#x3c3;&#x2267;800 MPa and m&#x2267;24, with an average grain size of the sintered material of no more than 2 &#x3bc;m, and wherein the sintered material of the deformation body has a density of not less than 3.98 g/cm.

Method for manufacturing an elastic body of Al2O3 ceramic, measuring membrane for a pressure sensor and pressure sensor with such a membrane

An elastic ceramic body and a pressure sensor. The elastic ceramic body comprises: a base body of an elastic ceramic material; and a cover layer, which covers at least one section of a surface of the base body, wherein the cover layer is of a material other than that of the base body, and the cover layer comprises microcrystalline AlO(corundum). The cover layer is preferably prepared in a sol gel process. The pressure sensor, comprises: a disk-shaped measuring membrane, which is embodied as an elastic ceramic body according to the above definition; and at least one membrane support body, on which the measuring membrane is connected at its edge region along an encircling joint to form a pressure-tight measuring chamber between the membrane support body and the measuring membrane.

Elastic ceramic body and pressure sensor with an elastic ceramic body

A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode, which faces the surface of the platform, the surface of the platform has at least a second electrode, which faces that of the measuring membrane. The capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.

Capacitive pressure sensor

A pressure transducer, including a housing having a housing axis and a measuring cell chamber defined in the housing. The measuring cell chamber is exposable to a pressure via an opening. The opening is surrounded by an annular, first sealing surface. A pressure measuring cell having a second sealing surface facing towards the opening, and a support surface facing away from the sealing surface sealing ring; and a clamping apparatus, which engages the housing are provided. The pressure measuring cell and the sealing ring are clamped by means of an axial clamping force in such a manner between the clamping apparatus and the first sealing surface, that the sealing ring is arranged pressure-tightly between the first sealing surface and the second sealing surface. The pressure transducer further includes a misalignment accommodating arrangement, which includes a first transmission body, which faces toward the opening, and a second transmission body, which is facing away from the opening. The axial clamping force is transmitted through the misalignment accommodating arrangement, from the clamping apparatus to the pressure measuring cell, and the first transmission body is tiltable relative to the second transmission body about two mutually perpendicular axes.

Pressure transducer

A pressure sensor including: A pressure measuring cell having an end face loadable with the medium; a housing having a media opening and a ring-shaped, axial bearing surface, which surrounds the media opening; a clamping apparatus; and a ring-shaped sealing arrangement. The pressure measuring cell is positioned in the housing and the sealing arrangement is positioned between the bearing surface and the end face, and the sealing arrangement, as well as the pressure measuring cell, are axially clamped between the bearing surface and the clamping apparatus. The sealing arrangement includes, a decoupling ring, as well as a first and a second, ring-shaped sealing element. The first sealing element lies against the end face, the second sealing element lies against the bearing surface, and the decoupling ring is axially clamped between the first and the second sealing elements.

Pressure sensor having a pressure measuring cell with a platform and a measuring membrane

The invention relates to a pressure measuring cell comprising a base body, a membrane that is connected to the base body, thus forming a measuring chamber. During operation, the membrane is subjected to a deflection which is dependent on a pressure that is to be measured. The cell also comprises a membrane bed, formed by a surface of the base body that faces the membrane, at least one electrode being mounted on said bed. Said electrode, together with a counter-electrode that is mounted on the membrane, forms a capacitor, whose capacitance represents a measurement for the deflection of the membrane. The measuring cell is characterized in that the electrode is electrically connected through the base body and that the measuring chamber has a smooth surface in the contact zone, said surface having a contact pin that is guided in a bore through the base body. The electrode is electrically connected by means of said pin for measuring the capacitance and the pin is soldered into the bore on the membrane side, using a solder. The contact pin, the solder and the membrane bed form a smooth surface.

Capacitive pressure measuring cell with a membrane bed

For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, with the pressure measuring cell being axially clamped between an elastic sealing ring, which bears against the membrane-bearing end face of the pressure measuring cell, and a support ring, which bears against the rear face of the pressure measuring cell, the dimensions of the support ring are coordinated with the dimensions of the sealing ring and pressure measuring cell such that a radial deformation of the membrane-bearing end face caused by the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor arising from a reduction of the axial clamping force by at least 10% amounts to not more than about 0.02%. Additionally, arranged between the support ring and a clamping ring is a stiff decoupling element, which minimizes the temperature hysteresis of the span. The geometry of the support ring and the decoupling element is determined iteratively by means of FEM.

A pressure sensor includes: a measuring cell having a base plate and a measuring membrane connected along its edge with the base plate, and means for generating an electrical quantity dependent on deformation of the measuring membrane; a circuit for registering the electrical quantity; and a capsule having a capsule body and a sealing element, with which the capsule is hermetically sealed along a joint. The capsule encloses the circuit, in order to protect such from influences of moisture; and the joint of the capsule is mechanically decoupled from the base plate. The mechanical decoupling of the joint means, for example, that at least the axial support of the pressure measuring cell in a housing is not allowed to be transferred through the joint. Despite arranging of the capsule on the base plate, pressure-related and temperature-related distortions of the base plate are not permitted to have any effects on the joint of the capsule.

Moisture-protected pressure sensor

For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, wherein the pressure measuring cell is axially clamped between an elastic sealing ring, which bears against the membrane-containing, end face of the pressure measuring cell, and a support ring, which supports the measuring cell on the rear side thereof, the dimensions of the support ring are matched to the dimensions of the sealing ring and the pressure measuring cell in such a way that a radial deformation of the membrane-containing end face resulting from the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor because of a reduction of the axial clamping force by a least 10% amounts to not more than 0.02%. The geometry of the support ring is determined iteratively by means of the FEM.

A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R&#x2014;Si&#x2014;X, RR&#x2014;Si&#x2014;X, RRR&#x2014;Si&#x2014;X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an &#x2014;OH (silanol), &#x2014;X (halide, e.g. &#x2014;Cl), &#x2014;OR (ester, e.g. &#x2014;OCH3), &#x2014;NH2 (amine), or &#x2014;SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes &#x2014;Si&#x2014;NH&#x2014;Si&#x2014;, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type R&#x2014;Me&#x2014;X, with Me=e.g. Zr, Ti.

Hydrophobically coated pressure sensor

The invention relates to a pressure measuring arrangement comprising a pressure measuring cell which is fed by a pressure corresponding to the pressure which is to be measured by a pressure tube filled by a pressurised liquid; at least one pressure recording unit is arranged separately from said cell, said unit being impinged upon by a pressure which is to be measured during operation, producing a pressure corresponding to the pressure which is to be measured via a pressure line filled by a liquid; a connection between the pressure tube and the pressure line. A modular design and a large amount of flexibility is obtained in respect of the spatial arrangement of the pressure measuring cell and the pressure recording unit. The connection consists of a base body wherein at least one end section of the pressure line is arranged, in addition to a pressure screw through which the pressure tube passes and is secured by a fixing element arranged on a side which is oriented towards the base body of the pressure screw. Said pressure screw has a thread which enables it to be screwed onto base body in such a way that the pressure tube and the pressure line are connected, and the connection is effectively sealed between the pressure tube and the pressure line.

Pressure measuring arrangement

In a differential pressure sensor, the measurement value is corrected with the help of the nominal pressure NP. In this way, influences on the measurement value because of deformations of the body of the differential pressure sensor and change in the material stiffness of the membrane are decreased.

Capacitive differential pressure sensor

A pressure sensor that is particularly suitable inter alia for the food industry and the measuring accuracy of which is stable over a long time, having a diaphragm seal () with a separating diaphragm () on which a pressure (P) to be measured acts and having a ceramic measuring cell () which is connected to the diaphragm seal () exclusively by inorganic materials, is provided, in which sensor the separating diaphragm () and all further sensor components coming into contact during measurement with a medium of which the pressure (P) is to be measured are metallic.

Pressure sensor having metallic diaphragm seal joint

The active brazing solder for brazing ceramic parts of alumina, particularly of high-purity alumina, contains a maximum of 12 wt. % Ti, a maximum of 8 wt. % Be, and less than 16.5 wt. % Fe, the remainder being Zr and any impurities that may be present. The active brazing solder has the following behaviour/features: Brazing temperature: lower than 1,000&deg; C.; the brazed joint is high-vacuum-tight over a long period of time; the coefficient of thermal expansion of the active brazing alloy is substantially identical to that of the alumina ceramic in the entire temperature range covered during the brazing process; the strength of the brazed joint between the two ceramic parts is so high that under tensile loading, fracture will result not at the joint, but in the adjacent ceramic; the pressure resistance of the active brazing solder is greater than 2 GPa; the active brazing solder is very good processable into powders having particle sizes on the order of 10 &mgr;m.

Active brazing solder for brazing alumina-ceramic parts

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Lörrach, Germany

Frank Hegner