Sensirion Ag

Frank Gütle

Stefan Thiele

Stefan Kostner

Zeljko Mrcarica

Ulrich Leidenberger

Lukas Rüthemann

Werner Hunziker

David Pustan

Lukas Hoppenau

Marcel Mittelmueller

An optical component () can include a chip comprising a carrier substrate () made of a semiconductor material and a membrane () disposed on a planar membrane-carrying surface of the carrier substrate (). The membrane () is formed integrally with the carrier substrate (). A cavity () is formed in the carrier substrate (), the cavity having a first end and a second end. The membrane () has a cavity-spanning portion that spans the cavity () at its first end. The cavity-spanning portion of the membrane () is transparent to light in a desired wavelength range. An optical element () for shaping, diffusing, or filtering the light is formed on or in the cavity-spanning portion of the membrane (). The optical component () may be manufactured in a wafer-level process. Also disclosed is an optoelectronic module that includes the optical component () together with an optoelectronic device.

Optical component, optoelectronic module and method of manufacture

A particulate matter sensor device comprising an enclosure () that comprises a flow inlet (), a flow outlet () and a flow channel () extending therebetween, a radiation source for emitting radiation into the flow channel () for interaction of the radiation with the particulate matter in the flow () of an aerosol sample when guided through the flow channel (), a radiation detector () for detecting at least part of said radiation after interaction with the particulate matter. The sensor device comprises a flow modifying device () arranged upstream of the radiation detector () and/or of the radiation source () for modifying the flow () for reducing particulate matter precipitation onto the radiation detector () and/or onto the radiation source () and/or the channel wall sections in close proximity to the detector () and/or source (). The invention also relates to a method of determining parameters of particulate matter in an aerosol sample by using such a particulate matter sensor device.

Particulate matter sensor device

A particulate matter sensor device comprises an enclosure () defining a flow channel (), a radiation source () for emitting radiation into the flow channel for interaction of the radiation with particulate matter in an aerosol sample in the flow channel, and a radiation detector () for detecting at least part of said radiation after interaction with the particulate matter. The sensor device comprises a flow modifying device () arranged upstream of the radiation detector and/or radiation source so as to reduce particulate matter precipitation onto the radiation detector, the radiation source and/or the channel wall sections in their proximity. The invention also relates to a method of determining parameters of particulate matter in an aerosol sample by using such a particulate matter sensor device.

A particulate matter (PM) sensor comprises a substrate forming a cavity (), the substrate comprising a semiconductor chip (), and a light source () arranged in the cavity (). The light source () is adapted to emit a light beam (). The light beam () forms a detection volume () for particulate matter () outside the cavity (). Optionally, the particulate matter sensor comprises an optical element () delimiting the cavity () at one end. The optical element () is configured to shape the light beam (). Further, the particulate matter sensor comprises at least one photodetector () that is integrated into a surface of the semiconductor chip (). The surface into which the at least one photodetector () is integrated faces the detection volume (). The at least one photodetector () is adapted to detect light () scattered by particulate matter () in the detection volume ().

Growing community of inventors

Stäfa, Switzerland

Frank Gütle