Robert Boschgmbh

Frank Freund

Ingo Herrmann

Daniel Herrmann

Ando Feyh

Daniel Christoph Meisel

Axel Franke

Karl-Franz Reinhart

Natalja Kehl

Martin Eckardt

A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.

Device for resonantly driving a micromechanical system

A circuit configuration for detecting an error occurring in a converter, that is designed for integrating an analog useful signal and a digital useful signal of the converter and checking in each instance, when the integrated analog useful signal reaches a specific threshold value, and when the integrated digital useful signal reaches a specific threshold value, the circuit configuration for the converter detecting an error if the threshold values are not reached within a defined time window.

Circuit configuration for detecting an error in a converter

A sensor system has a first sensor-element block and a second sensor-element block, at least one first sensor element and one second sensor element are assigned to the first sensor-element block, and at least one third sensor element is assigned to the second sensor-element block. The third sensor element is situated between the first and second sensor elements.

Sensor system and method for operating a sensor system

A micro-structured reference element for use in a sensor having a substrate and a dielectric membrane. The reference element has an electrical property which changes its value on the basis of temperature. The reference element is arranged with respect to the substrate so that the reference element is (i) electrically insulated from the substrate, and (ii) thermally coupled to the substrate. The reference element is arranged on the underside of the dielectric membrane. The reference element and side walls of the substrate define a circumferential cavern therebetween, which is also bounded by the dielectric membrane, arranged between them. The dielectric membrane is connected to the substrate. A surface area of the reference element which is covered by the dielectric membrane is greater than or equal to 10% and less than or equal to 100% of the possible coverable surface area. A surface of the cavern which is covered by the dielectric membrane is greater than or equal to 50% and less than or equal to 100% of the possible coverable surface. An edge of the reference element which faces the dielectric membrane has greater than or equal to 50% and less than or equal to 100% of its extent contacted by the dielectric membrane. Sections of the side walls of the cavern which face the dielectric membrane have greater than or equal to 50% and less than or equal to 100% of the possible size contacted by the dielectric membrane.

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Stuttgart, Germany

Frank Freund