Carl-zeiss-smt Ag

Carl Zeiss Smt Gmbh

Schott Ag

Frank Eisert

Udo Dinger

Martin Weiser

Guenther Seitz

Siegfried Stacklies

Hans-Juergen Mann

Yim-Bun Patrick Kwan

Armin Schoeppach

Jochen Hetzler

Ina Mitra

Timo Laufer

Johannes Zellner

Hans Michael Stiepan

Martin Lowisch

Konrad Knapp

Stefan Koehler

Alexander Winkler

Andreas Ochse

Hans Morian

Martin Scheid

A diffractive optical element () for a test interferometer () measures a shape of an optical surface (). Diffractive shape measuring structures () are arranged on a used surface () of the element and generate a test wave () irradiating the surface when the element is arranged in the interferometer. At least one test field () several profile properties of test structures contained in the test field. The profile properties characterize a profile line of the test structures extending transversely with respect to the used surface and include a flank angle of the profile line, a profile depth and a depth of a microtrench in a bottom region of a trench-shaped profile of the test structures. The test field is arranged at one location of the used surface instead of the diffractive shape measuring structures such that the test field is surrounded by several diffractive shape measuring structures.

Diffractive optical element for a test interferometer

An optical arrangement includes at least one optical element and a support element for the optical element. The optical element and the support element are connected together by way of at least three decoupling elements. The decoupling elements are formed monolithically with the optical element and with the support element.

Optical arrangement and microlithographic projection exposure apparatus including same

A projection objectivefor short wavelengths, in particular for wavelengths &#x3bb;&#x3c;157 nm is provided with a number of mirrors [MMMMMand Mthat are arranged positioned precisely in relation to an optical axisThe mirrors [MMMMMand Mhave multilayer coatings. At least two different mirror materials are provided which differ in the rise in the coefficient of thermal expansion as a function of temperature in the region of the zero crossing of the coefficients of thermal expansion, in particular in the sign of the size.

Projection objective

A mirror for use in a projection exposure apparatus is described. The mirror has a main surface extending beyond an outline of an optical surface of the main surface. The optical surface has a roughness of less than 1 nm rms, and the outline of the optical surface includes a portion where the main surface extends beyond the optical surface by less than 0.2 mm. Manufacturing the mirror may involve polishing the optical surface in regions of the main surface extending beyond the optical surface and removing material of the substrate carrying a portion of the surface extending beyond the optical surface.

Mirror for use in a projection exposure apparatus

A method of manufacturing an optical element having an optical surface extending close to a periphery of a substrate comprises: providing a substrate having a main surface extending beyond a periphery of the optical surface and also performing a polishing of the optical surface in regions of the main surface extending beyond the optical surface. Thereafter, material of the substrate carrying a portion of the surface extending beyond the optical surface is removed.

Method of manufacturing an optical element

There is provided a substrate material for an optical component for X-rays of wavelength &#x3bb;. The substrate includes (a) a glass phase made of amorphous material having a positive coefficient of thermal expansion, and (b) a crystal phase including microcrystallites having a negative coefficient of thermal expansion and a mean size of less than about 4 &#x3bb;. The substrate material has a stoichiometric ratio of the crystal phase to the glass phase such that a coefficient of thermal expansion of the substrate material is less than about 5&#xd7;10Kin a temperature range of about 20 &#xb0;C. to 100&#xb0;C. The substrate material, following a surface treatment, has a high spatial frequency roughness (HSFR) of less than about &#x3bb;/30 rms.

Substrate material for X-ray optical components

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Aalen, Germany

Frank Eisert