Applied Materials, Inc.

Conrac Corporation

Frank D Roberts

Geoffrey Ryding

Theodore H Smick

Marvin Farley

Takao Sakase

Adrian John Murrell

Bernard F Harrison

Peter I Edwards

Semiconductor processing apparatus is disclosed which provides for movement of a scanning armof a substrate or wafer holder, in at least two generally orthogonal directions (so-called X-Y scanning). Scanning in a first direction is longitudinally through an aperturein a vacuum chamber wall. The armis reciprocated by one or more linear motorsA,B. The armis supported relative to a slideusing gimballed air bearings so as to provide cantilever support for the arm relative to the slide. A compliant feedthroughinto the vacuum chamber for the armthen acts as a vacuum seal and guide but does not itself need to provide bearing support. A Faradayis attached to the armadjacent the substrate holderto allow beam profiling to be carried out both prior to and during implant. The Faradaycan instead or additionally be mounted adjacent the rear of the substrate holder or at 90&#xb0; to it to allow beam profiling to be carried out prior to implant, with the substrate support reversed or horizontal and out of the beam line.

Multi-directional scanning of movable member and ion beam monitoring arrangement therefor

A door holder-closer comprising a conventional door closer and a novel electromechanical door holder attached to the drive spindle of the door closer. The door holder features a lever which is coupled to the drive spindle of the door closer by an adjustable clamp comprising mating rotor and cone elements. Both the rotor and the cone are seated over the drive spindle with the cone being fixed to the spindle. The rotor is formed with a projecting rotor tab which is selectively engaged by a pawl. The lever is formed with a notch which selectively engages a roller driven by an electromagnet-actuated armature. The motion of the door closer spindle is restrained by a primary latch formed when the roller is seated within the lever notch in response to an energized electromagnet, and by a secondary latch formed when the pawl engages the rotor tab. The primary latch supports and controls the secondary latch. Hold-open door control occurs when both latches are in effect concurrently. If the primary latch is broken, either in response to deenergization of the electromagnet or the application of a manual overriding force on the controlled door, the secondary latch is automatically released and the hold-open mode terminates. The hold-open mechanism, which has as its principal components the rotor-cone clamp, the pawl-rotor latch and the electromagnetically actuated lever-roller latch, may be fabricated as a separate and integral unit that is simply seated upon the door-closer drive spindle to add a door-hold function to the door closer.

Electromechanical door holder-closer

Growing community of inventors

North Reading, MA, United States of America

Frank D Roberts