Delsys Pharmaceutical Corporation

Frank B Lang

William Ronald Roach

Nitin Vithalbhai Desai

Timothy Allen Pletcher

David A Keller

Hoi Cheong Sun

Joseph Thomas McGinn

Peter David Southgate

David Norman Ludington

Provided is an electrostatic sensing chuck for attracting particles to a portion of a particle contact surface near a deposition electrode, the electrostatic sensing chuck comprising a pixel comprising: a deposition electrode (DE) for selectively establishing an attraction field (E ) at the particle contact surface; a shield electrode (SE) oppositely biased with respect to the deposition electrode; a charge sensing circuit to measure charge accumulated on each of the deposition electrode and the shield electrode, wherein the charge sensing circuit subtracts a second charge it senses at the shield electrode from a first charge it senses at the deposition electrode, thereby determining accumulated charge at the deposition electrode balanced by accumulated charge at the shield electrode.

Electrostatic sensing chuck using area matched electrodes

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Princeton, NJ, United States of America

Frank B Lang