Riber

Franck Stemmelen

Jean-Louis Guyaux

Olivier Grange

Christophe De Oliveira

Jean Louis Guyaux

The invention relates to an evaporation cell () for vacuum evaporation chamber, the evaporation cell () comprising a crucible (), the crucible () being adapted to receive a solid or liquid material to be sublimated or evaporated, heating means () to heat the material in the crucible, a nozzle () placed at an open end of the crucible (), the nozzle () comprising a frustoconical portion () having an opening () adapted for the passage of a flow of evaporated or sublimated material towards the vacuum evaporation chamber, and a cover () placed on the nozzle (), the cover () having an opening () arranged about the frustoconical portion () of the nozzle (). According to the invention, the cover () has at least one frustoconical portion () arranged about the frustoconical portion () of the nozzle (), the cover () forming a thermal barrier between the crucible () and the vacuum evaporation chamber.

Evaporation cell for vacuum evaporation chamber and associated evaporation method

An injector for a vacuum evaporation source includes an injection duct () having a longitudinal axis () and an inlet port () able to be connected to a vacuum evaporation source, and at least one nozzle () for diffusing a vaporized material, the nozzle () having a lateral face (), and an upper face (). The nozzle () includes a main channel () emerging outside the injection duct () and at least a lateral feeding channel () connecting the interior of the injection duct () to the main channel (). The lateral feeding channel () has a lateral orifice () emerging inside the injection duct () through the lateral face () of the nozzle () for avoiding the clogging of the nozzle () by oxidized materials.

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Vaureal, France

Franck Stemmelen