Industrial Technology Research Institute

Forest Shih-Sen Chien

Hung-Ming Tai

Sai Hoi Tsao

A method for oxidizing a nitride film is disclosed, which includes the steps of: providing a nitride film formed on an electrically conductive substrate; irradiating the nitride film with a light beam and getting close to the nitride film with a electrically conductive probe; and exerting a bias between the electrically conductive substrate and the electrically conductive probe. The method can oxidize the nitrides quickly and reduce the cost building a nano-structure in the nitride film. An apparatus for oxidizing a nitride film is also disclosed herewith.

Method and apparatus for oxidizing nitrides

A versatile switching module to control the switching operation of multiple relay switches and to monitor the status of each relay includes a driving card and multiple relay cards, each relay card in turn including a number of relays, with each relay representing a testing channel made up of three testing terminals. In one embodiment, one driver card may be used to control four relay cards, each relay card having sixteen relays and each relay having four single-pole double-throw switches.

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Hsinchu, Taiwan

Forest Shih-Sen Chien