Asml Netherlands B.v.

Floris Zoethout

Henricus Wilhelmus Maria Van Buel

Tim Peter Johan Gerard Maas

Bartolomeus Martinus Johannes Van Hout

An apparatus () for removing contaminant particles () from a component () of an apparatus (, MT), the contaminant particles giving rise to an ambient electric field (E), the apparatus comprising: a collection region () for attracting the particles, wherein the ambient electric field is at least between the component and the collection region; and an electric field generator configured to establish an applied electric field between the collection region and the component to cause the particles to be transported from the component to the collection region, wherein the electric field generator is configured to determine the polarity of the applied electric field based on the ambient electric field.

Growing community of inventors

Gendt, Netherlands

Floris Zoethout