Solayer Gmbh

Florian Peter Schwarz

Markus Kress

Dzmitry Hrunski

Marco Seibert

Martin Portka

Michael Geisler

The invention relates to a diaphragm assembly of an aperture diaphragm for delimiting the coating region which is operative in the deposition of a layer and to a sputtering device which uses the diaphragm assembly. The diaphragm assembly comprises a main part () which has a passage () delimited by a passage edge. The aim of the invention is to design the diaphragm opening to be temporally and geometrically variable in situ. This is achieved in that the diaphragm assembly has at least one diaphragm plate (″) which is assembled on the main part () so as to be movable in front of the passage () and back. The diaphragm assembly additionally comprises a movement device which is operatively connected to the diaphragm plate (″) in order to carry out the movement thereof.

Diaphragm assembly for delimiting the coating region of a sputter source, and sputtering device

Sputter devices comprise a vacuum supply, a gas supply, a substrate holding device, and sputter sources. Each sputter source is held by an individual source support, each of which has an individual reference point allocated on a sputter surface facing the deposition area, and each of which has a source distance to a source reference surface from the individual reference point. The sputter sources are spaced apart from each other, are arranged as a two-dimensional array opposite the deposition area, and extend along the source reference surface. The source reference surface is parallel to the substrate reference surface. At least one of the sputter sources has a source distance deviating from zero.

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Aschaffenburg, Germany

Florian Peter Schwarz