Vat Holding Ag

Florian Ehrne

Martin Netzer

Andreas Hofer

Christof Bachmann

Thomas Blecha

Daniel Seitz

Marco Apolloni

Hanspeter Frehner

Friedrich Geiser

Eligio Belleri

Fabian Büchel

Matthias Wozasek

Christoph Bachmann

Thomas L Swain

Klaus Latzer

Disclosed is a regulating vacuum valve having a first valve seat having a first valve opening defining a first opening axis and a first sealing surface surrounding the first valve opening, and a first valve disk having a first contact surface corresponding to the first sealing surface. The valve includes a drive unit coupled to the first valve disk to adjust at least between an open position to a closed position. The regulating vacuum valve has at least one second valve seat, having a second valve opening with a second sealing surface. In addition, a second valve disk having a second contact surface corresponding to the second sealing surface is provided. An overall valve opening of the regulating vacuum valve is formed by the first valve opening as a first valve partial opening and the second valve opening as a second valve partial opening.

Vacuum valve for providing a symmetrical fluid flow

A closure device for closing an opening in a wall in a vacuum-tight manner has a valve plate, which by way of a connecting device is connected to a valve rod, for closing and exposing the opening. The connecting device has a swivel head of which at least portions of the external surface are of a spherical configuration and which is disposed in a receptacle space of a joint body. For blocking a rotation of the swivel head about the longitudinal axis of the valve rod, at least one projecting stud, that is disposed on the swivel head or joint body, protrudes into an assigned groove which is disposed in the other one of these two parts and which in a central position of the connecting device extends in a plane that lies parallel to the longitudinal axis of the valve rod.

Closure device for closing an opening in a wall in a vacuum-tight manner

A safeguarding device includes one or more positive-fit units that safeguard a wafer-transport-container opening element of a wafer transport container, which is held in its closure position by a closing mechanism. The closing mechanism includes one or more chambers, which includes a pressure connection channel that allows a variation of an inner pressure in the chamber relative to a reference pressure. A differential pressure is calculated from the inner pressure of the chamber and the reference pressure and influences a safeguarding status of the positive-fit unit.

Safeguarding device, wafer transport container with at least one safeguarding device, safeguarding system and method with the safeguarding device

A seal support ring () for a valve (), particularly a vacuum valve, which has a throughflow opening () and a basic body (), which annularly surrounds the throughflow opening, and a fastener arrangement () for fastening the seal support ring to a valve housing () of the valve. The basic body has a first side () on which the seal support ring, in a mounted state on the valve housing, lies against the valve housing, and the seal support ring has a seal ring () made from an elastomer which, in its position on the basic body, surrounds the throughflow opening. A casing wall () is arranged on the basic body and at least partially surrounds the throughflow opening and, on a second side () of the basic body () opposite the first side, protrudes from the basic body and has a larger inside diameter than the seal ring.

Seal support ring for a valve

An assembly, including a first chamber () and at least one second chamber () and at least one pivoting drive () for pivoting a pivoting object () of the assembly, wherein the pivoting object () is arranged in the first chamber () and at least one intermediate wall () is arranged between the first chamber () and the second chamber (). A transmission body (), which is annular at least in some sections, can be rotated about an axis of rotation () by the pivoting drive () and is fed through at least one feed-through opening (), preferably two feed-through openings (), in the intermediate wall ().

Assembly having a first chamber and at least one second chamber

A wafer transfer unit includes at least one data processing unit, which is configured at least for a registration and/or processing of sensor data of at least one sensor, allocated to at least one sub-component of a wafer transfer system, of a sensor module, in particular includes at least one wafer processing module of the wafer transfer system, includes at least one wafer interface system of the wafer transfer system with a wafer transport container and a loading and/or unloading station for a loading and/or unloading of the wafer transport container and/or of the wafer processing module, includes at least one wafer transport container transport system of the wafer transfer system and/or includes at least one wafer handling robot of the wafer transfer system.

Wafer transfer unit and wafer transfer system

A positioning device, in particular a wafer transportation container positioning device, for positioning a wafer transportation container in a loading and/or unloading position of a loading and/or unloading station which is configured at least for loading and/or unloading wafers from the wafer transportation container. The positioning device, in particular the wafer transportation container positioning device, comprises a positioning mechanism which is configured for contactless positioning of the wafer transportation container in a coupling process between the wafer transportation container and the loading and/or unloading station.

Positioning device, loading and/or unloading system and method for operating a positioning device

Vacuum valve having a valve housing with first and second valve openings, and a closure unit having first and second plates, a roller support arranged between the plates, multiple roller pairs, each formed from first and second spreading rollers, and a spring. The plates are carried together with the roller support when it moves parallel to a movement direction from the open position into an intermediate position, and an additional movement of the plates in the movement direction is blocked when the roller support moves from the intermediate position into a closed position, during which the spreading rollers move along rising flanks of recesses, and the plates are thus spread apart. Rotational axes of the spreading rollers of each roller pair are offset relative to each other and are spaced apart in the spreading direction by a distance smaller than a sum of the radiuses of the spreading rollers.

Vacuum valve

A vacuum valve has a valve opening () that is surrounded by a valve seat (), a valve plate () that releases the valve opening () in an open state and rests against the valve seat () in a closed state, and a carrier unit () that supports the valve plate () and moves between a first position, in which the valve opening () is in the open state, and a second position. The valve plate () moves between a retracted position and an extended position. In the second position of the carrier unit () and in the extended position of the valve plate (), the valve opening () is in the closed state. In the retracted position, the valve plate () is supported against the carrier unit ().

A vacuum valve having a valve body with a valve opening surrounded by a valve seat, a closure member displaceable parallel to a longitudinal adjustment direction between an open position, and an intermediate position, in which the closure member covers the valve opening but is raised from valve seat, and a closed position, a valve rod supporting the closure member, a longitudinal stroke linear guide which has a longitudinal stroke slider connected to the valve rod and a longitudinal stroke guide part by which the longitudinal stroke slider is guided in a linearly displaceable manner in the longitudinal adjustment direction, and a transverse stroke linear guide which includes a transverse stroke slider connected to the longitudinal stroke guide part and a transverse stroke guide part by which the transverse stroke slider is guided in a linearly displaceable in an oblique adjustment direction positioned oblique to the longitudinal adjustment direction.

A vacuum valve including a valve body with first and second valve openings, first and second closure elements attached to a valve rod, a longitudinally adjustable transmission piece attached to the valve rod that is adjustable from an open position into an intermediate position, and in a transverse adjustment direction from the intermediate position into a first closing position, and counter thereto into a second closing position. The transmission piece is connected to the valve body via a longitudinal stroke linear guide and a transverse stroke linear guide having a transverse stroke guide part which extends parallel to an oblique adjustment direction and a transverse stroke carriage displaceably guided thereon. To adjust the transmission piece from the intermediate position into the first or second closing position, the transverse stroke carriage is linearly displaceable in or counter to the oblique adjustment direction from a central position into a first or second press-on position.

A valve with an opening surrounded by a seat, and a closure member, which, in a closed position, presses onto the seat and closes the opening and, in an intermediate position, is raised from the seat and overlaps with the opening and, in a maximum opening position, at least partially releases the opening. The valve has a first valve drive for moving the closure member between the maximum opening position and the intermediate position along a first movement track, and a second valve drive for moving the closure member between the intermediate position and the closed position along a second movement track which is at an angle to the first movement track. The valve has at least one transmission part which is provided for reversible deformation by the second valve drive, and the first valve drive acts on the closure member with the interposition of the transmission part.

Valve

A closure device for the vacuum-tight closure of an opening includes a closure element, at least one rod that projects out of a housing of the closure device and that, outside the housing, supports the closure element and that is rigidly connected to a carrier piece, a transmission unit which is adjustable by a drive parallel to the longitudinal adjustment direction between an initial, open position of the closure element, a middle position, in which the closure element assumes the intermediate position, and a closed, end position. At least one spring is arranged between the transmission unit on the carrier piece, and a stop device which, during adjustment of the transmission unit from the middle to the end position, blocks a further adjustment of the carrier piece parallel to the longitudinal adjustment direction. The transmission unit is guided by at least one longitudinal linear guide to be displaceable relative to the housing parallel to a longitudinal adjustment direction, and the carrier piece is guided by at least one oblique linear guide to be displaceable relative to the transmission unit parallel to an oblique adjustment direction.

Closure device for the vacuum-tight closure of an opening in a wall

Method of operating a valve () which connects openings () of at least two chambers () to one another and, for closing the openings () of each of the chambers (), has at least one dedicated closure member (), wherein for opening one of the openings (), the chamber () assigned to said opening () has generated in it a positive pressure which is higher than a current pressure in the valve-housing interior (), wherein, by virtue of this positive pressure, the closure member () assigned to said opening is raised up from the valve seat () assigned to said opening () and then, through this opening (), pressure equalization is carried out between the valve-housing interior () and the chamber () assigned to said opening (). (FIG.)

Method of operating a valve

A vacuum valve includes a valve housing () with at least one valve opening (), at least one valve plate () and a carrying unit (), which carries the at least one valve plate (). The at least one valve plate () is connected to the carrying unit () via at least two connecting devices, each having a connecting part (), with a neck portion () and an enlarged head portion (), which projects in relation to the neck portion (), and having a receiving part (), with a respective receiving slot () into which the neck portion () of the connecting part (). In order to prevent the connecting parts () from moving out of the receiving slots (), at least one of the receiving parts () of the connecting devices can be rotated about an axis of rotation () from an introduction position, in which the associated connecting part () can be introduced into the receiving slot (), by way of its neck portion (), as far as the end position, into a blocking position.

Growing community of inventors

Frumsen, Switzerland

Florian Ehrne