Centre National De La Recherche Scientifique

Florent Houdellier

Marc Monthioux

Arnaud Arbouet

Martin Hytch

Etienne Snoeck

Florian Hue

A device and method for emitting electrons by a field effect. The device () includes a vacuum chamber () including a tip () having an end () and forming a cold cathode, an extracting anode (), components adapted for generating a potential difference between the tip () and the anode ();

Device and method for electron emission and device including such an electron emission system

A field-emission electron gun including an electron emission tip, an extractor anode, and a mechanism creating an electric-potential difference between the emission tip and the extractor anode. The emission tip includes a metal tip and an end cone produced by chemical vapor deposition on a nanofilament, the cone being aligned and welded onto the metal tip. The electron gun can be used for a transmission electron microscope.

Electron gun emitting under high voltage, in particular for electron microscopy

A method is provided that includes the steps of i) providing a specimen in the form of a wafer having a measurement area and a reference area, assumed to be without deformations and coplanar with the measurement area; ii) illuminating one face of the specimen with an electron beam (F); iii) superposing a beam (F) of radiation diffracted by the measurement area (B) with a beam (F) of the radiation diffracted by the reference so as to cause these two beams to interfere; iv) measuring the spatial periodicity and the orientation of the fringes of the interference pattern (FI); and v) deducing from this a difference in the lattice parameter and/or the orientation between the reference and measurement areas, which is indicative of a state of deformation of the latter at the nanoscale. A device and system for implementing the method is also provided.

Growing community of inventors

Calmont, France

Florent Houdellier