Stmicroelectronics International N.v.

Stmicroelectronics S.r.l.

Filippo Daniele

Lorenzo Baldo

Enri Duqi

Giorgio Allegato

Andrea Nomellini

Maria Carolina Turi

Salvatore Alongi

Giulio Capelli

A pressure-sensor includes a substrate with a cavity therein and a membrane suspended over the cavity. The cavity is connected to external air pressure so a change in external air pressure causes out-of-plane movement of the membrane. A frame suspended over the membrane includes a segment connected to the membrane but disconnected from other frame portions. A projection extends from the frame. A first spring is connected to the projection, a second spring is connected to the segment, and an end portion connects the springs so out-of-plane movement of the membrane applies out-of-plane force to the second spring, which is transferred to the first spring by the end portion and translated to an in-plane force by the first spring and applied to the projection. This causes lateral sliding movement of the frame with respect to the substrate. A capacitive-sensor detects sliding movement of the frame with respect to the substrate.

Linear capacitive pressure sensor

Growing community of inventors

Milan, Italy

Filippo Daniele