Murata Manufacturing Co., Ltd.

Filip Iliev

Sean McHugh

Patrick J Turner

Neal O Fenzi

Bryant Garcia

Julius Koskela

Greg Dyer

John Pandelis Koulakis

Acoustic resonators, acoustic filter devices and methods of making the same. An acoustic resonator device includes a piezoelectric plate having front and back surfaces, an interdigital transducer (IDT) on the front surface including interleaved fingers extending alternately from opposed first and second busbars, an overlapping distance of the interleaved fingers defining an aperture of the acoustic resonator device, and a dielectric layer formed over and between the interleaved fingers, wherein the dielectric layer extends from between an edge of the aperture and the first busbar to between the an opposite edge of the aperture and the second busbar.

Transversely-excited film bulk acoustic resonators with improved coupling and reduced energy leakage

An acoustic resonator has a piezoelectric plate attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate. An interdigital transducer (IDT) formed on the plate has interleaved fingers on the diaphragm with first parallel fingers extending from a first busbar and second parallel fingers extending from a second busbar of the IDT. A distance between the interleaved fingers defines an IDT pitch. The IDT has a gap distance between the ends of the first plurality of parallel fingers and the second busbar, and between the ends of the second plurality of parallel fingers and the first busbar; and the gap distance is less than ⅔ times the IDT pitch.

Transversely-excited film bulk acoustic resonators with narrow gaps between busbars and ends of interdigital transducer fingers

Acoustic resonators, filters, and methods. An acoustic resonator includes a substrate, piezoelectric plate, and a diaphragm comprising a portion of the piezoelectric plate spanning a cavity in a substrate. An interdigital transducer (IDT) on a front surface of the piezoelectric plate includes first and second sets of interleaved interdigital transducer (IDT) fingers extending from first and second busbars respectively. The interleaved IDT fingers are on the diaphragm. Overlapping portions of the interleaved IDT fingers define an aperture of the acoustic resonator. A first dielectric strip overlaps the IDT fingers in a first margin of the aperture and extends into a first gap between the first margin and the first busbar. A second dielectric strip overlaps the IDT fingers in a second margin of the aperture and extends into a second gap between the second margin and the second busbar.

Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures

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Filip Iliev