Teknologian Tutkimuskeskus Vtt Oy

Chipmetrics Oy

Feng Gao

Riikka Puurunen

Jyrki Kiihamäki

Ari Hokkanen

Päivi Heimala

Jyrki KIIHAMÄKI

An apparatus associated with an analysis of a thin film layer comprises two layer structures () with a cavity () therebetween, and an opening () through one of the layer structures () to the cavity (), the cavity () being configured to receive, through the opening (), material used to form a thin film layer () inside the cavity (). At least one of the two layer structures () comprises at least one positional indicator () for an analysis associated with the thin film layer ().

Apparatus associated with analysis of thin film layer and manufacturing method thereof

The application relates to microfluidic needles and their manufacturing methods. The microfluidic needle comprises an interface portion containing at least one fluid communication channel, an elongated needle portion () projecting away from the interface portion (), the needle portion having a tip and sidewalls connecting the tip to the interface portion, and at least two microfluidic channels (A-B) within the needle portion in fluidic connection with the at least one communication channel, the microfluidic channels being at least partly oriented parallel to the elongated needle portion. According to the application, the microfluidic channels exit the needle portion at the sidewalls of the needle portion. The needle may be fabricated by ALD-assisted silicon micromachining. The needle can be used for injection and/or sampling fluids to/from tissue or individual cells.

Microneedle

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Espoo, Finland

Feng Gao