Tsinghua University

Feng-Der Chin

Yung-Hsien Wu

Li-karn Wang

The present disclosure uses ammonia plasma for nitrification and for further forming a barrier pattern on a substrate. Then, a selective emitter is fabricated by forming light doping and heavy doping at one time through diffusion into the substrate. Therein, a plurality of trenches for obtaining a front contact is formed at the same time on forming the barrier pattern. Thus, the fabrication process is simplified and the cost is reduced for fabricating a selective emitter solar cell.

Growing community of inventors

Hsinchu, Taiwan

Feng-Der Chin