Chinese Academy of Sciences

Shanghai Micro Electronics Equipment Co., Ltd.

Feng Chi

Huijie Huang

Ya Cheng

Lin Guo

Zhaogu Cheng

Jianfang Chen

Jinming Zhou

Motor stator

Four-axis four-subdividing interferometer comprising a four-axis light splitting module and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser. The four-axis light splitting system comprises three 50% plane beam splitters and three 45-degree plane reflecting mirrors. The invention comprises a four-axis four-subdividing plane mirror interferometer and a four-axis four-subdividing differential interferometer. In the differential interferometer, an adjustable 45-degree reflecting mirror is used to guide the reference light to a reference reflecting mirror which is arranged in the same direction as a measurement mirror and fixed on the moving object.

Four-axis four-subdividing interferometer

Six-axis four-subdividing interferometer comprising a six-axis light splitting system and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser, wherein the six-axis light splitting system comprises five 45-degree plane beam splitters and four 45-degree full-reflecting mirrors.

Six-axis four-subdividing interferometer

Growing community of inventors

Shanghai, China

Feng Chi