Steag Micro Tech Gmbh

Felix Wehrle

Martin Weber

Dieter Meister

Jurgen Funkhanel

In a device for the wet treatment of substrates (,) in a container (,), containing a treatment fluid (,), whereby the substrates (,) are introduced into the container (,) with a substrate carrier (,), an optimal alignment and centering of the substrates (,) will result within the container (,) upon lifting from the container (,) with the aid of a substrate receiving device (,) provided within the container (,).

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Donaueschingen, Germany

Felix Wehrle