Valeo Schalter Und Sensoren Gmbh

Espros Photonics Ag

Felix Müller

Beat De Coi

Thomas Schuler

Peter Horvath

Lin Lin

Martin Popp

Jochen Schenk

Frank Selbmann

Jürgen Nies

Jan Simon

Michael Kleiser

Heiko Hofmann

A method for controlling a drive apparatus () of a micro-oscillation mirror (), a control device () and a deflector mirror apparatus () are described. The drive apparatus () has at least two comb drives () which are arranged on different radial sides of a pivoting axis () of the micro-oscillation mirror (). In the method, at least two actuation signals AS, AS) are generated, and the at least two comb drives () are therefore actuated at least temporarily in such a way that they drive the micro-oscillation mirror () in an oscillating fashion. At least one elongation signal (P, P), which characterizes the elongation () of the micro-oscillation mirror () is generated using at least one comb drive (). At least one of the actuation signals (AS, AS) is adapted to the oscillation of the micro-oscillation mirror () on the basis of at least one of the elongation signals (P, P), At least one of the comb drives () is connected, by means of at least one switching apparatus (), alternately to an actuation apparatus () for receiving at least one actuation signal (AS, AS) or to an elongation-detection apparatus () for generating at least one elongation signal (P, P).

Method for controlling a drive apparatus of a micro-oscillation mirror, control device and deflector mirror apparatus

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Bietigheim-Bissingen, Germany

Felix Müller