Average Co-Inventor Count = 9.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (1 from 1,413 patents)
2. Kla Corporation (1 from 538 patents)
1 patent:
1. 12510692 - Protection of optical materials of optical components from radiation degradation