Ilc Technology, Inc.

Cyberoptics Corporation

Cyberoptics Semiconductor, Inc.

Felix J Schuda

Roy D Roberts

DelRae H Gardner

Craig C Ramsey

Ferris J Chen

Dennis J Bonciolini

Mark C Leclair

A wafer-like semiconductor sensor includes a wafer-like base formed of a plurality of layers of chemically-hardened glass and an electronics module mounted to a recessed pocket in the base and containing a sensor.

Wafer-like sensor

An inline particle sensor includes a sensor head configured to mount within a fitting, the sensor head including a laser source sealed and isolated from a sensing volume and configured to emit a laser beam through the sensing volume and a detector arranged to detect particles in the sensing volume that pass through the laser beam. The vacuum particle sensor further includes electronics coupled to the sensor head and configured to receive a signal indicative of the particles from the detector and provide a particle output based on the signal.

Inline particle sensor

A substrate-like particle sensor includes a substrate-like base portion and an electronics enclosure disposed on the substrate-like base portion. A power source is located within the electronics enclosure. A controller is operably coupled to the power source. A particle sensor is operably coupled to the controller and provides an indication to the controller of at least one particle present near the particle sensor.

Substrate-like particle sensor

An improved laser-based wafer carrier mapping sensor is provided. The sensor includes a number of improvements including laser source improvements; optical improvements; and detector improvements. Laser source improvements include the type of laser sources used as well as the specification of size and power of such sources. Optical improvements include features that intentionally defocus the laser stripe on the wafer as well as additional features that help ensure precision stripe generation. Detector improvements include increasing gain while decreasing the effects of ambient light. Various combinations of these features provide additional synergies that facilitate the construction of a sensor with significantly improved dynamic response while decreasing the frequency of false cross slot errors.

Semiconductor wafer carrier mapping sensor

Lamp module

A light source comprises a high intensity lamp that is clamped between four half-shell finned heatsinks. The upper heatsink half-shells for the anode and cathode ends of the lamp are mounted to an upper printed circuit board and the lower heatsink half-shells are mounted to a lower main printed circuit board. A direct current powered fan is positioned on one side to blow horizontally through the matrix of heatsinks and out the opposite side. Only the lamp igniter and fan power supply circuits are included in the upper printed circuit board which receives lamp power from the lower printed circuit boards through the anode and cathode heatsinks and one additional connection comprising a flexible wire. The main power supply is included on the lower printed circuit board and it converts and preregulates 110 VAC or 220 VAC to 160 VDC to a transistor chopping switch that in turn provides the required low voltage lamp power. A cooling ring is mounted to the front of the lamp and includes a tilted hot mirror that reflects infrared light back to the lamp but off-axis five to ten degrees to improve lamp life. A fiberoptic cable adapter and backing ring are mounted and optically aligned in front of the lamp such that the fiberoptic cable adapter can be changed from the outside without affecting the optical pre-alignment. The whole is packaged in a housing that assists the fan in cooling the lamp by directing airflow through the heatsinks.

Small lamp and power supply assembly

The present invention comprises a transformer having a magnetic core that is smaller and shorter than the winding form for the primary and secondary coils, the core is surrounded by an sound deadening and insulating material, such as foam, and is encased in a sealed tube.

Silent lamp igniter

A short-arc flashlamp of the type having an internally integral reflector including an anode and cathode member mounted to extend along a central axis of symmetry of the lamp and having distal ends spaced apart to define a short-arc gap. The lamp is driven by current pulses such that the average peak currents across the arc gap exceed about one hundred amperes in pulses ranging from about two to ten microseconds.

Integral reflector flashlamp

A short-arc lamp of the type having an internally integral reflector including electrodes mounted to extend along a central axis of symmetry of the lamp and having distal ends of similar shape which are spaced apart to define a short-arc gap such that the lamp can be directly driven by alternating current.

Growing community of inventors

Saratoga, CA, United States of America

Felix J Schuda