Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Audi Ag

Volkswagen Ag

Felix Horstmann

Bernd Szyszka

Volker Sittinger

Wolfgang Werner

Thomas Drescher

Joachim Schuetz

Annegret Matthai

Tjhay Weyna Boentoro

Bernd Hangleiter

Heike Walter

Felix Sittinger

Bernd Szyzska

A method for producing a transparent and conductive metal oxide layer on a substrate, includes atomizing at least one component of the metal oxide layer by highly ionized, high power pulsed magnetron sputtering to condense on the substrate. The pulses of the magnetron have a peak power density of more than 1.5 kW/cm, the pulses of the magnetron have a duration of &#x2266;200 &#x3bc;s, and the average increase in current density during ignition of the plasma within an interval, which is &#x2266;0.025 ms, is at least 106 A/(ms cm).

Method for producing a transparent and conductive metal oxide layer by highly ionized pulsed magnetron sputtering

The present invention relates to a glass product, comprising a glass substrate with a transparent and conductive indium tin oxide layer having a covering layer, which forms a redox barrier for the indium tin oxide layer, wherein the indium tin oxide layer is obtained by pulsed, highly ionizing high-power magnetron sputtering (HPPMS) in which&#x2014;the pulses of the magnetron have a peak power density greater than 1.5 kW/cm,&#x2014;the pulses of the magnetron have a time duration that is &#x2266;200 &#x3bc;s, and&#x2014;the mean current flow density rise upon ignition of the plasma within a time interval that is &#x2266;0.025 ms is at least 106 &#x39b;(ms cm2), and the indium tin oxide layer has a crystalline structure, in such a way that the (222)-reflection of an X-ray diffraction spectrum after the production of the indium tin oxide layer is shifted relative to the powder spectrum of indium tin oxide by a maximum of 1 degree, preferably by 0.3 degrees to 0.5 degrees, in the direction of compressive stress and is shifted after heat treatment by a maximum of 1 degree, preferably by 0.2 degrees to 0.4 degrees, in the direction of the powder spectrum.

Glass product

Growing community of inventors

Braunschweig, Germany

Felix Horstmann