Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Felix Heinrich

Hans-Joachim Quenzer

Joachim Janes

Shanshan Gu-Stoppel

Embodiments of the present invention provide an apparatus including a micromirror, an excitation structure containing or supporting the micromirror, and at least one piezoelectric sensor. The excitation structure includes at least one piezoelectric actuator, the excitation structure being configured to resonantly excite the micromirror so as to cause a deflection of the micromirror. The at least one piezoelectric sensor is configured to provide a sensor signal dependent on the deflection of the micromirror, the piezoelectric sensor being connected to the excitation structure so that during the resonant excitation of the micromirror, the sensor signal and the deflection of the micromirror exhibit a fixed mutual phase relationship.

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Barmstedt, Germany

Felix Heinrich