Flisom Ag

Felix Budde

Dominik Rudmann

Marc Kaelin

Thomas Studer

A method for manufacturing a compound film comprising a substrate and at least one additional layer is disclosed. The method comprising the steps of depositing at least two chemical elements on the substrate and/or on the at least one additional layer using depositions sources, maintaining depositing of the at least two chemical elements while the substrate and the deposition sources are being moved relative to each other, measuring the compound film properties, particularly being compound film thickness, compound-film overall composition, and compound-film composition in one or several positions of the compound film, comparing the predefined values for the compound film properties to the measured compound film properties, and adjusting the deposition of the at least two chemical elements in case the measured compound film properties do not match the predefined compound film properties.

Method for manufacturing a compound film

A method and an apparatus for laser beam processing of an element () that has a total transmittance for light of at least 10, comprising a laser unit () for generating a laser beam on one side of the to-be-processed element (), an illumination unit (), an imaging system () comprising a sensor unit on the one side of the to-be-processed element (), the sensor unit recording residual light that results from light of the illumination unit (), a scanning unit () for adjusting the laser beam processing position, and a control unit. The control unit is operatively connected to the laser unit (), the imaging system () and the scanning unit (), and the illumination unit () is positioned on the other side of the to-be-processed element () in relation to the laser unit (). Since the to-be-processed element () allows light to pass through an otherwise opaque or almost opaque layer, a good contrast is obtained that is used to determine the position of the laser beam with high precision. Therefore, high precision laser processing is possible for materials with low transmission for light and low mechanical stability like flexible thin film solar cells.

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Zurich, Switzerland

Felix Budde