Xi'an Jiaotong University

Feilong Zhang

Mingzhe Rong

Aijun Yang

Xiaohua Wang

Huan Yuan

Dingxin Liu

Wei Ke

Minyuan Chen

Jiaqi Liu

Disclosed are an online vacuum degree detection system and method based on single-fiber laser-induced breakdown spectroscopy. In the system, a laser device generates laser that excites the laser through fiber induced breakdown spectroscopy; a fiber coupler couples and injects the laser; a single fiber is connected to the fiber coupler to transmit the laser; one end of an LIBS probe is connected to the single fiber, and the other end of the LIBS probe extends into a vacuum arc-extinguishing chamber; the laser is induced by the LIBS probe to generate plasma, and the plasma is subjected to self-emission imaging and enters the fiber coupler via the LIBS probe; a dichroscope is arranged on the fiber coupler to separate the laser from the plasma; a processor is connected to a camera and a spectrometer.

Online vacuum degree detection system and method based on single-fiber laser-induced breakdown spectroscopy

Growing community of inventors

Shaanxi, China

Feilong Zhang