Shanghai Quicktron Intelligent Technology Co., Ltd

Shanghai Micro Electronics Equipment (group) Co., Ltd.

Shanghai Quicktron Intelligen Technology Co., Ltd

Rheinisch-Westfälisch-Technische Hochschule Aachen

Fei Ni

Hao Wu

Weiru Bo

Ruiliang Cui

Wei Huang

Lin Nan Li

Lin Li

Lili Ge

Leilei Xing

Run Huang

Xu Zhou

Haicang Cui

Paolo Castello

Carlo Muscas

Junqi Liu

Paolo Attilio Pegoraro

Tang Tang

Antonello Monti

Xinpeng Guo

Jinyuan Wang

Transfer robot

Conveyor

Disclosed are a package placement method and apparatus, the method comprising: obtaining an obstacle distribution of placement areas adjacent to a target placement area, each placement area being correspondingly provided with a package storage apparatus; according to the obstacle distribution, determining a movement direction for a conveying platform to enter the target placement area, the conveying platform being used for placing a package in the package storage apparatus; according to the movement direction for the conveying platform, determining a package placement means; according to the determined package placement means, placing the package in the package storage apparatus corresponding to the target placement area. The package placement means is determined according to the obstacle distribution, and the conveying platform is controlled to move and place the package, thereby saving placement time, eliminating conveying platform stopping and restarting time, and increasing placement efficiency.

Package placement method, package placement control apparatus and package placement device

A silicon wafer edge protection device having: a horizontal motion assembly; vertical motion assembly; speed regulating device, which is in signal connection with the vertical motion assembly and used for regulating vertical motion assembly motion speed; flexible bumper assembly, which is connected to the horizontal motion assembly and vertical motion assembly and used for reducing the amplitude of vibration of the silicon wafer edge protection device when a collision occurs; and control device, which is in signal connection with the speed regulating device and used for sending a control signal to the speed regulating device to control motion of the vertical motion assembly. The silicon wafer edge protection device can prevent a wafer stage from undergoing an instantaneous strong impact and prevent a silicon wafer from being crushed. When a collision occurs, the wafer stage and the silicon wafer can be protected. Production efficiency is also improved.

Silicon wafer edge protection device

Growing community of inventors

Shanghai, China

Fei Ni