Asml Netherlands B.v.

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Everhardus Cornelis Mos

Frank Staals

Thomas Theeuwes

Jochem Sebastiaan Wildenberg

Roy Werkman

Maxim Pisarenco

Erik Johannes Maria Wallerbos

Davit Harutyunyan

Vahid Bastani

Fuming Wang

Cornelis Johannes Rijnierse

Hugo Thomas Looijestijn

Tom Van Hemert

A method, system and program for determining a fingerprint of a parameter. The method includes determining a contribution from a device out of a plurality of devices to a fingerprint of a parameter. The method includes obtaining parameter data and usage data, wherein the parameter data is based on measurements for multiple substrates having been processed by the plurality of devices, and the usage data indicates which of the devices out of the plurality of the devices were used in the processing of each substrate; and determining the contribution using the usage data and parameter data.

Method for determining contribution to a fingerprint

A method, system and program for determining a fingerprint of a parameter. The method includes determining a contribution from a device out of a plurality of devices to a fingerprint of a parameter. The method including: obtaining parameter data and usage data, wherein the parameter data is based on measurements for multiple substrates having been processed by the plurality of devices, and the usage data indicates which of the devices out of the plurality of the devices were used in the processing of each substrate; and determining the contribution using the usage data and parameter data.

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Eindhoven, Netherlands

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