Actoprobe LLC

Fei Hung Chu

Gennady A Smolyakov

Alexander A Ukhanov

Chengao Wang

A new integrated III-V/silicon Atomic Force Microscopy (AFM) active optical probe integrates a III-V semiconductor laser source and a silicon cantilever AFM probe into a robust easy-to-use single III-V/silicon chip to enable AFM measurements, optical imaging, and spectroscopy at the nanoscale.

Integrated III-V/silicon atomic force microscopy active optical probe

A new monolithic Atomic Force Microscopy (AFM) active optical probe monolithically integrates a base of the probe, a cantilever, a semiconductor laser source, an AFM tip, and a photodetector into a robust, easy-to-use single semiconductor chip to enable AFM measurements, optical imaging, and optical spectroscopy at the nanoscale.

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Albuquerque, NM, United States of America

Fei Hung Chu