International Business Machines Corporation

Fei Ding

Armin W Knoll

Rainer Friedbert Mahrt

Thilo Hermann Stoeferle

Urs T Duerig

A method of fabrication of a micro-optics device included providing a layer of material; patterning the layer of material by one or more of: locally unzipping and desorbing molecules thereof, with a nano-scale dimensioned probe, to obtain a curved surface for the layer of material, the curved surface having a curved profile in a plane section; and completing a layer structure perpendicular to the plane section by providing one or more additional layers of material in contact with the curved surface to obtain the micro-optics device, wherein the micro-optics device has the layer structure, with a given layer thereof comprising a defect delimited by two surfaces, wherein one of the two surfaces is the curved surface.

Fabrication of a micro-optics device with curved surface defects

A vertical microcavity having a layer structure perpendicular to a vertical axis z, includes a first reflector and a second reflector, each comprising one or more material layers; a confinement layer between the reflectors, wherein an electromagnetic wave can be substantially confined, the confinement layer having a body and a defect delimited by first and second surfaces, perpendicular to the vertical axis z; wherein one of the two surfaces is contiguous with the body, the other one contiguous with a layer of the first or second reflector, and wherein one of the two surfaces has a curved profile in at least a plane section perpendicular to the layer structure, the curved profile having a vertex, which defines a maximal thickness hof the defect between the first surface and the second surface in the plane section, the maximal thickness hbeing less than a thickness of the contiguous layer.

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Rueschlikon, Switzerland

Fei Ding