Taiwan Semiconductor Manufacturing Comp. Ltd.

Faruk Krecinic

Jeng-Horng Chen

Ru-Gun Liu

Wen-Chun Huang

Hung-Chun Wang

Tzu-Chin Lin

Pei-Shiang Chen

Shih-Ming Chang

Shy-Jay Lin

Chien-Hsun Chen

Wei-Long Wang

Tuane Ying Fang

The present disclosure provides for many different embodiments of a charged particle beam data storage system and method. In an example, a method includes dividing a design layout into a plurality of units; creating a lookup table that maps each of the plurality of units to its position within the design layout and a data set, wherein the lookup table associates any repeating units in the plurality of units to a same data set; and exposing an energy sensitive layer to a charged particle beam based on the lookup table.

Electron beam data storage system and method for high volume manufacturing

A direct-write system is provided which includes a stage for holding a substrate, a processing module for processing pattern data and generating instructions associated with the pattern data, and an exposure module that includes beams that are focused onto the substrate and a beam controller that controls the beams in accordance with the instructions. The processing module includes vertex pair processors each having bit inverters. Each vertex pair processor is operable to process a respective vertex pair of an input scan line to generate an output scan line. Each bit inverter is operable to invert a respective input bit of the input scan line to generate a respective output bit of the output scan line if a bit position is located between the respective vertex pair, otherwise the respective input bit is copied to the respective output bit. The instructions correspond to the output bits for each beam.

System and method for generating direct-write pattern

Growing community of inventors

Hsinchu, Taiwan

Faruk Krecinic