Asml Netherlands B.v.

Fanhe Kong

Ferry Zijp

Duygu Akbulut

Sietse Thijmen Van Der Post

A method including obtaining a plurality of radiation distributions of measurement radiation redirected by the target, each of the plurality of radiation distributions obtained at a different gap distance between the target and an optical element of a measurement apparatus, the optical element being the nearest optical element to the target used to provide the measurement radiation to the target, and determining a parameter related to the target using data of the plurality of radiation distributions in conjunction with a mathematical model describing the measurement target.

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Eindhoven, Netherlands

Fanhe Kong