Electro Scientific Industries, Inc.

Fang Shan

Mathew Noel Rekow

Haibin Zhang

Glenn Simenson

Robert B Reichenbach

James Brookhyser

Michael John Darwin

Qian Xu

Chuan Yang

Joe Frankel

Jack Rundel

Matthew Pysher

Min Zhang

The present invention is a method for separating a workpiece from a common substrate. It includes the steps of providing the workpiece, generating, within a beam source, a beam of laser pulses configured to modify a portion of the workpiece, determining a depth for creating a modified region based upon a characteristic of the workpiece and modifying a plurality of regions within the workpiece to form a plurality of modified regions. Modifying the plurality of regions includes directing the beam of laser pulses from an output of the beam source onto the workpiece, causing relative motion between the workpiece and the output of the beam source while directing the beam of laser pulses onto workpiece, and modifying a characteristic of the pulses of the beam upon generating a number of pulses which generally correspond to creating the modified regions to the determined depth.

Method and apparatus for separation of workpieces and articles produced thereby

Laser output () is employed to mark an article () including a layer () supported by a substrate (), wherein the layer () has a thickness (t) that is less than or equal to 50 microns. The laser output () is focused to a numerical aperture diffraction-limited spot size () of less than or equal to 5 microns at a focal point () of the beam waist () and directed into the layer () to form a plurality of structures comprising a plurality of laser-induced cracks within the layer () and within a region of the article (), wherein the laser-induced cracks terminate within the layer () without extending to the substrate () or an outer surface () of the layer (), and wherein the plurality of structures are configured to scatter light incident upon the article ().

Laser systems and methods for internally marking thin layers, and articles produced thereby

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San Jose, CA, United States of America

Fang Shan