Taiwan Semiconductor Manufacturing Comp. Ltd.

Fang-I Chih

Kei-Wei Chen

Hui-Chi Huang

Hsin-Ying Ho

Chia-Jung Hsu

Chih-Chieh Chang

Chun-Hao Kung

Kao-Feng Liao

Ching-Hsiang Tsai

Tung-Kai Chen

Yen-Chang Chao

Chih-chieh Chang

Hui-chi Huang

A planarization method includes: providing a substrate, wherein the substrate includes a first region and a second region having different degrees of hydrophobicity or hydrophilicity, the second region covering an upper surface of the first region; polishing the substrate with a polishing slurry until the upper surface of the first region is exposed; and continuing polishing and performing a surface treatment by the polishing slurry to adjust the degree of hydrophobicity or hydrophilicity of at least one of the first region and the second region. The polishing slurry and the upper surface of the second region have a first contact angle, and the polishing slurry and the upper surface of the first region have a second contact angle. The surface treatment keeps a contact angle difference between the first contact angle and the second contact angle being equal to or less than 30 degrees during the polishing.

Chemical mechanical polishing method

A planarization method and a CMP method are provided. The planarization method includes providing a substrate with a first region and a second region having different degrees of hydrophobicity or hydrophilicity and performing a surface treatment to the first region to render the degrees of hydrophobicity or hydrophilicity in proximity to that of the second region. The CMP method includes providing a substrate with a first region and a second region; providing a polishing slurry on the substrate, wherein the polishing slurry and the surface of the first region have a first contact angle, and the polishing slurry and the surface of the first region have a second contact angle; modifying the surface of the first region to make a contact angle difference between the first contact angle and the second contact angle equal to or less than 30 degrees.

A multiple metallization scheme in conductive features of a device uses ion implantation in a first metal layer to make a portion of the first metal layer soluble to a wet cleaning agent. The soluble portion may then be removed by a wet cleaning process and a subsequent second metal layer deposited over the first metal layer. An additional layer may be formed by a second ion implantation in the second metal layer may be used to make a controllable portion of the second metal layer soluble to a wet cleaning agent. The soluble portion of the second metal layer may be removed by a wet cleaning process. The process of depositing metal layers, implanting ions, and removing soluble portions, may be repeated until a desired number of metal layers are provided.

Multiple metallization scheme

A polishing composition for a chemical mechanical polishing process includes abrasive particles, at least one chemical additive, and a non-aqueous solvent.

Compositions for use in chemical mechanical polishing

A semiconductor device and method of formation are provided. A semiconductor device includes a first material comprising STI adjacent a fin. The STI is substantially uniform, such that a top surface of the STI has few to no defects and little to no concavity. To form the STI, the first material is implanted with a dopant, which forms an etch stop layer, such that the first material height is reduced by etching rather than CMP. Etching results in a better uniformity of the first material than CMP. STI that is substantially uniform comprises a better current barrier between adjacent fins than a device that comprises STI that is not substantially uniform.

Growing community of inventors

Tainan, Taiwan

Fang-I Chih