Front Edge Technology, Inc.

Fan-Hsiu Chang

Kai-Wei Nieh

Victor Krasnov

Chun-Ting Lin

Su-Jen Ting

Paul Tang

A method of depositing lithium phosphorus oxynitride on a substrate, the method comprising loading a substrate into a vacuum chamber having a target comprising lithium phosphate, introducing a process gas comprising nitrogen into the chamber and maintaining the gas at a pressure of less than about 15 mTorr; and forming a plasma of the process gas in the chamber to deposit lithium phosphorous oxynitride on the substrate.

Sputter deposition of lithium phosphorous oxynitride material

A rechargeable battery has a battery cell at least partially enclosed by a casing. The battery cell comprises (1) a substrate; (2) a cathode and cathode current collector on the substrate, the cathode being electrically coupled to the cathode current collector; (3) an electrolyte electrically coupled to the cathode or cathode current collector; and (4) a permeable anode current collector having a first surface electrically coupled to the electrolyte and an opposing second surface, the permeable anode current collector: (1) having a thickness that is less than about 1000 &angst; and that is sufficiently small to allow cathode material to permeate therethrough to form an anode on the opposing second surface of the permeable anode current collector when the battery cell is electrically charged, and (2) that is absent an overlayer on the opposing second surface of the anode current collector. Positive and negative terminals are electrically connected to the battery cell. The permeable anode current collector may be a grid with perforations.

Growing community of inventors

Miao-Li, Taiwan

Fan-Hsiu Chang