Alcatel Hochvakuumtechnik Gmbh

Falk Braunschweig

Heinz D Burger

Klaus Handke

A device detects leaks in a test object (1), which is contained in a test container (2). The device includes a mass spectrometer (14) detecting a noble gas such as helium, and a pump arrangement containing a primary vacuum pump (13) and a spiromolecular pump (11). The noble gas atoms flow through the latter in opposition to the pump direction towards the mass spectrometer. Between the test container (2) and an outlet port (10) of the spiromolecular pump (11), an accumulation chamber (8) is inserted, whose volume is considerably larger than that of the test container (2). The test container is provided with a source of purge gas (3) and a valve (4) for purging the test container with a purge gas under an adjustable overpressure. Closure valve (7) is disposed between the test container (2) and the accumulation chamber (8) and a closure valve (9) between the accumulation chamber (8) and the outlet port (10) of the spiromolecular pump (11).

Growing community of inventors

Wertheim, Germany

Falk Braunschweig