Mykrolis Corporation

Celerity, Inc.

Millipore Corporation

Brooks Instrument, LLC

Faisal Tariq

Kenneth E Tinsley

Stuart A Tison

Hai Mei

Dwight S Larson

Daryl Buchanan

Systems and methods for producing and delivering vapor are disclosed. A vaporizer tank containing a liquid may be heated such that liquid within the tank is heated and vapor generated. The flow of this vapor to a destination may then be regulated. Embodiments of the present invention may control the temperature of this liquid such that a saturated vapor condition is substantially maintained in the vaporizer tank. The vaporizer tank is coupled to a mass flow controller which regulates the delivery of the vapor to downstream components. By substantially maintaining the saturated vapor condition within the vaporizer tank the pressure of vapor at the mass flow controller can be substantially maintained and a stable and consistent flow rate of vapor achieved.

System and method for producing and delivering vapor

Systems and methods for mass flow controllers which minimize false flow conditions and display a reduced sensitivity to pressure transients are disclosed. Pressure gradients that exist within the volume of a mass flow controller fluid path are minimized in order to limit the potential energy contained in compressed or pressurized process gas. Additionally, process gas pressure may be monitored using a pressure sensor. This pressure signal is utilized in conjunction with a control algorithm to cancel the detrimental effect of certain flow components. These mass flow controllers may be used as drop in replacements for legacy mass flow controllers and reduce the cost of gas sticks due to elimination of discrete components such as pressure regulators, gas filters, pressure transducers, local pressure displays, isolation valves, seals, etc.

Method and system for a mass flow controller with reduced pressure sensitivity

Embodiments of the present invention provide a system and method of valve control that eliminates, or at least substantially reduces, the shortcomings of prior art valve control systems and methods. More particularly, embodiments of the present invention provide systems and methods for multi-channel valve control. One embodiment of the present invention includes a system of valve control that comprises a processor, a computer readable medium accessible by the processor and a set of computer instructions that are executable by the processor to output a first signal on a first channel indicating an initial force to be applied to a valve by an actuator and output a second signal on a second channel indicating a control force to be applied to the valve.

Valve control system and method

Embodiments of the present invention can include the steps of (i) filtering the indicated flow to derive an intermediate filtered indicated flow, (ii) deriving a weighted first derivative of the intermediate filtered indicated flow, and (iii) outputting a filtered indicated flow comprising the sum of the intermediate filtered indicated flow and the weighted first derivative of the intermediate filtered indicated flow. The indicated flow can be filtered using a FIR, an IIR a running average or other filtering scheme.

System and method for filtering output in mass flow controllers and mass flow meters

Embodiments of the present invention provide a method for filtering an indicated flow. One embodiment of the present invention can include the steps of (i) determining if the indicated flow is within an allowable deviation of a baseline, (ii) if the indicated flow is within the allowable deviation, outputting the indicated flow as the filtered indicated flow, and (iii) if the indicated flow is not within the allowable deviation, outputting a value that is within the predefined range as the filtered indicated flow. This embodiment of the present invention can also include determining if the indicated flow exceeds a buffer. If the indicated flow does not exceed the buffer, one embodiment of the present invention can continue to output the value that is within the allowable deviation.

The mass flow controller of the present invention includes a sensor. This sensor is used to detect a mass flow within a gas line. Additionally, this sensor provides an output to an electronic control system coupled to the sensor. The electronic control system will determine an expected mass flow based on the output of the sensor. The electronic control system will adjust a control valve with a control signal to regulate a first gas flow through the control valve.

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Allen, TX, United States of America

Faisal Tariq