Asml Netherlands B.v.

Asml Holding N.v.

Fadi El-Ghussein

Timothy A Brunner

Krishanu Shome

Sergei Sokolov

Roxana Rezvani Naraghi

Lambertus Gerardus Maria Kessels

Ali Alsaqqa

A calibration system includes a plate, a fixed alignment mark, and a variable diffraction grating. The plate is adjacent to a wafer alignment mark disposed on a wafer. The fixed alignment mark is disposed on the plate and is configured to act as a reference mark for an initial calibration of the calibration system. The variable diffraction grating is disposed on the plate and includes a plurality of unit cells configured to form a plurality of variable alignment marks. The variable diffraction grating is configured to calibrate a shift-between-orders of one of the variable alignment marks and the fixed alignment mark.

Variable diffraction grating

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Holmdel, NJ, United States of America

Fadi El-Ghussein