Trumpf Schweiz Ag

Glaston Switzerland Ag

Fabio Jutzi

Matthias Loppacher

Sebastien Lani

Dara Bayat

Andre Hoffmann

Jörg Leyendecker

This disclosure relates to devices for two-dimensional deflection of a laser beam, which include a substrate having a substrate opening, a spring membrane provided on the substrate having spring arms extending over the substrate opening, and a middle section arranged in the substrate opening and supported by the spring arms. The middle section is mounted so it is two-dimensionally tiltable and is axially displaceable in both directions of the spring membrane middle axis. The device includes a mirror fastened on the middle section of the spring membrane and a magnetic or electrostatic drive for tilting the mirror against the restoring force of the spring arms. One or more of a component coupled to the mirror and an end stop unit are configured to limit axial deflection of the middle section to a distance that is within a range of axial deflection of the middle section during the drive-related tilting of the mirror.

Devices for deflecting a laser beam in a two-dimensional manner

This disclosure relates to systems that include a substrate and a platform connected to the substrate by at least one flexure hinge. The platform is movable relative to the substrate. The systems also include at least one position sensor having a plurality of piezoresistive elements that are connected to one another so as to form an electrical bridge. One of the piezoresistive elements of the plurality of piezoresistive elements is positioned on the at least one flexure hinge. At least one other piezoresistive element of the plurality of piezoresistive elements is positioned on at least one of the substrate and the platform.

Piezoresistive position sensor systems

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Chur, Switzerland

Fabio Jutzi