Commissariat a L'energie Atomique

Fabien Filhol

Claire Divoux

Micro-mirror or micro-lens made up of a moving part () with a reflective or refringent zone (), a fixed part (), means of connection () of the moving part () to the fixed part () which forms an axis of rotation () for the moving part () and of means for controlling () the rotation. The means of control include two or more actuators () arranged either side of the axis (), each formed of a fixed electrode () forming part of the fixed part () and a moving electrode () possessing a free end () and an end connected to a drive arm () which is substantially parallel to the axis () and emerging from the moving part (). The moving electrode () adheres to the fixed electrode () from its free end () when a voltage is applied to the actuator (), the adhesion is a function of the applied voltage. Application to optical systems.

Electrically rotationally actuatable micro-mirror or micro lens

The present invention relates to a micromirror comprising a mobile part with a reflecting area, a fixed part, two torsion arms originating from the mobile part materializing an axis about which the mobile part can oscillate, this axis being approximately parallel to a principal plane of the mobile part and passing through the mobile part while being offset from the center of mass of the mobile part, each torsion arm having one end connected to the fixed part through bimorph actuation means. The bimorph actuation means comprise a solid stack with deposited or add-on layers for each torsion arm, including a part made of an active material capable of changing volume and/or shape under the effect of an excitation, co-operating with a passive flexible structure.

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Saint-Égrève, France

Fabien Filhol