Carl Zeiss Smt Gmbh

Fabian Haacker

Markus Hauf

Martin Endres

Stig Bieling

Johannes Eisenmenger

Markus Holz

Lars Wischmeier

Jan Horn

Benedikt Knauf

Yanko Sarov

Benjamin Sigel

Mark Christof Wengler

A method for illuminating an object field of a projection exposure apparatus includes providing a subset of first facets to be positioned in park positions, which are each spaced apart from an associated target position, but at most by a maximum distance.

Method for illuminating an object field of a projection exposure system

A mirror device includes at least one electrically conductive shielding element, which forms a mechanism for producing an electric field in a region adjacent to at least one side surface and/or a rear side of a mirror body.

Mirror device

A mirror array includes a multiplicity of displaceable individual mirrors which are subdivided into at least two groups. The individual mirrors of the first group are displaceable in a very precise manner, and the individual mirrors of the second group are displaceable in a very quick manner.

Mirror array

An optical component includes at least one micro-opto-electro-mechanical system (MOEMS) with a front side and a rear side. The optical component also includes at least one printed circuit board arranged on the rear side of the at least one MOEMS. The at least one printed circuit board has lateral contacts. The at least one printed circuit board may be equipped with electronic parts and cooling elements. The at least one MOEMS projects laterally beyond the at least one printed circuit board.

Optical component

Growing community of inventors

Aalen, Germany

Fabian Haacker